Epitaxial LiNbO3 thin films grown by the "eclipse method"

Dong Wook Kim, Sang Moon Oh, T. W. Noh, See Hyung Lee

Research output: Contribution to journalArticlepeer-review


LiNbO3 thin films were grown by pulsed laser deposition (PLD) with a shadow mask, which is called the "eclipse method". Epitaxial twin-free films were obtained using a single crystal target without a postannealing process. The films had very smooth surface without the particulate problem, which is common in films grown by conventional PLD. The root-mean-sqaure surface roughness was only 3 nm, and optical propagation loss was as low as 3 dB/cm.

Original languageEnglish
Pages (from-to)S1408-S1410
JournalJournal of the Korean Physical Society
Issue number4 SUPPL.
StatePublished - 1998


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