Energy band engineered unified-RAM (URAM) for multi-functioning 1T-DRAM and NVM

Jin Woo Han, Seong Wan Ryu, Sungho Kim, Chung Jin Kim, Jae Hyuk Ahn, Sung Jin Choi, Kyu Jin Choi, Byung Jin Cho, Jin Soo Kim, Kwang Hee Kim, Gi Sung Lee, Jae Sub Oh, Myong Ho Song, Yun Chang Park, Jeoung Woo Kim, Yang Kyu Choi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

17 Scopus citations

Abstract

A novel fusion memory is proposed as a new paradigm of silicon based memory technology. An O/N/O gate dielectric and a floating body are combined with a FinFET, and the non-volatile memory (NVM) and high speed capacitorless 1T-DRAM are performed in a single transistor. A nitride trap layer is used as an electron storage node for NVM, and hetero-epitaxially grown Si/Si 1-xGex energy band engineered bulk substrates allow excess hole storage for 1T-DRAM. Highly reliable 1T-DRAM and NVM are demonstrated.

Original languageEnglish
Title of host publication2008 IEEE International Electron Devices Meeting, IEDM 2008
DOIs
StatePublished - 2008
Event2008 IEEE International Electron Devices Meeting, IEDM 2008 - San Francisco, CA, United States
Duration: 15 Dec 200817 Dec 2008

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918

Conference

Conference2008 IEEE International Electron Devices Meeting, IEDM 2008
Country/TerritoryUnited States
CitySan Francisco, CA
Period15/12/0817/12/08

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