Abstract
The development of a SU-8-based microgripper that can operate in physiological ionic solutions is presented. The electrothermally activated polymer gripper consists of two "hot-and-cold-arm" actuators that are fabricated in a two-mask surface micromachining process. The high thermal expansion coefficient of SU-8 (52 ppm/°C) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 - 32 °C) at low voltages (1-2 V). The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions.
Original language | English |
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Pages (from-to) | 857-863 |
Number of pages | 7 |
Journal | Journal of Microelectromechanical Systems |
Volume | 14 |
Issue number | 4 |
DOIs | |
State | Published - Aug 2005 |
Keywords
- Polymer MEMS
- Polymer microgripper
- Single cell manipulation
- SU-8 actuators