Electrothermally activated SU-8 microgripper for single cell manipulation in solution

Nikolas Chronis; Luke P. Lee

doi:10.1109/JMEMS.2005.845445

Electrothermally activated SU-8 microgripper for single cell manipulation in solution

Nikolas Chronis, Luke P. Lee

Department of Chemistry & Nanoscience

Research output: Contribution to journal › Article › peer-review

349 Scopus citations

Abstract

The development of a SU-8-based microgripper that can operate in physiological ionic solutions is presented. The electrothermally activated polymer gripper consists of two "hot-and-cold-arm" actuators that are fabricated in a two-mask surface micromachining process. The high thermal expansion coefficient of SU-8 (52 ppm/°C) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 - 32 °C) at low voltages (1-2 V). The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions.

Original language	English
Pages (from-to)	857-863
Number of pages	7
Journal	Journal of Microelectromechanical Systems
Volume	14
Issue number	4
DOIs	https://doi.org/10.1109/JMEMS.2005.845445
State	Published - Aug 2005

Bibliographical note

Funding Information:
Manuscript received May 5, 2004; revised October 28, 2004. This work was supported by DARPA under the BioFlips program. Subject Editor N. de Rooij. The authors are with the Berkeley Sensor and Actuator Center, Department of Bioengineering, University of California, Berkeley, CA 94720 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/JMEMS.2005.845445

Keywords

Polymer MEMS
Polymer microgripper
SU-8 actuators
Single cell manipulation

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10.1109/JMEMS.2005.845445

Cite this

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title = "Electrothermally activated SU-8 microgripper for single cell manipulation in solution",

abstract = "The development of a SU-8-based microgripper that can operate in physiological ionic solutions is presented. The electrothermally activated polymer gripper consists of two {"}hot-and-cold-arm{"} actuators that are fabricated in a two-mask surface micromachining process. The high thermal expansion coefficient of SU-8 (52 ppm/°C) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 - 32 °C) at low voltages (1-2 V). The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions.",

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author = "Nikolas Chronis and Lee, {Luke P.}",

note = "Funding Information: Manuscript received May 5, 2004; revised October 28, 2004. This work was supported by DARPA under the BioFlips program. Subject Editor N. de Rooij. The authors are with the Berkeley Sensor and Actuator Center, Department of Bioengineering, University of California, Berkeley, CA 94720 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/JMEMS.2005.845445",

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AU - Lee, Luke P.

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AB - The development of a SU-8-based microgripper that can operate in physiological ionic solutions is presented. The electrothermally activated polymer gripper consists of two "hot-and-cold-arm" actuators that are fabricated in a two-mask surface micromachining process. The high thermal expansion coefficient of SU-8 (52 ppm/°C) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 - 32 °C) at low voltages (1-2 V). The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions.

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Electrothermally activated SU-8 microgripper for single cell manipulation in solution

Abstract

Bibliographical note

Keywords

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