@inproceedings{673274e010bd4d6e9a82de6ed794fc4e,
title = "Electrostatic MEMS variable optical attenuator with folded micromirror",
abstract = "A reflection type VOA with folded micromirror was designed and fabricated. The proposed mirror structure can reduce the size of device by parallel alignment of the two fibers. Lensed fibers are used for high coupling efficiency and ease of assembly. The initial insertion loss is about 0.6 dB and the maximum attenuation is about 30 dB. The switching time of the fabricated VOA is about 1 ms.",
keywords = "Assembly, Electrostatics, Insertion loss, Micromechanical devices, Micromirrors, Mirrors, Optical attenuators, Optical fiber devices, Optical losses, Optical reflection",
author = "Lim, {Tae Sun} and Ji, {Chang Hyeon} and Oh, {Chang Hoon} and Youngjoo Yee and Bu, {Jong Uk}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; null ; Conference date: 18-08-2003 Through 21-08-2003",
year = "2003",
doi = "10.1109/OMEMS.2003.1233507",
language = "English",
series = "2003 IEEE/LEOS International Conference on Optical MEMS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "143--144",
booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",
}