Electrostatic MEMS variable optical attenuator with folded micromirror

Tae Sun Lim, Chang Hyeon Ji, Chang Hoon Oh, Youngjoo Yee, Jong Uk Bu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

A reflection type VOA with folded micromirror was designed and fabricated. The proposed mirror structure can reduce the size of device by parallel alignment of the two fibers. Lensed fibers are used for high coupling efficiency and ease of assembly. The initial insertion loss is about 0.6 dB and the maximum attenuation is about 30 dB. The switching time of the fabricated VOA is about 1 ms.

Original languageEnglish
Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages143-144
Number of pages2
ISBN (Electronic)078037830X, 9780780378308
DOIs
StatePublished - 2003
Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
Duration: 18 Aug 200321 Aug 2003

Publication series

Name2003 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference2003 IEEE/LEOS International Conference on Optical MEMS
Country/TerritoryUnited States
CityWaikoloa
Period18/08/0321/08/03

Keywords

  • Assembly
  • Electrostatics
  • Insertion loss
  • Micromechanical devices
  • Micromirrors
  • Mirrors
  • Optical attenuators
  • Optical fiber devices
  • Optical losses
  • Optical reflection

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