Electrostatic MEMS variable optical attenuator with folded micromirror

Tae Sun Lim; Chang Hyeon Ji; Chang Hoon Oh; Youngjoo Yee; Jong Uk Bu

doi:10.1109/OMEMS.2003.1233507

Electrostatic MEMS variable optical attenuator with folded micromirror

Tae Sun Lim, Chang Hyeon Ji, Chang Hoon Oh, Youngjoo Yee, Jong Uk Bu

Electronic and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

A reflection type VOA with folded micromirror was designed and fabricated. The proposed mirror structure can reduce the size of device by parallel alignment of the two fibers. Lensed fibers are used for high coupling efficiency and ease of assembly. The initial insertion loss is about 0.6 dB and the maximum attenuation is about 30 dB. The switching time of the fabricated VOA is about 1 ms.

Original language	English
Title of host publication	2003 IEEE/LEOS International Conference on Optical MEMS
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	143-144
Number of pages	2
ISBN (Electronic)	078037830X, 9780780378308
DOIs	https://doi.org/10.1109/OMEMS.2003.1233507
State	Published - 2003
Event	2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003

Publication series

Name	2003 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference	2003 IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Waikoloa
Period	18/08/03 → 21/08/03

Keywords

Assembly
Electrostatics
Insertion loss
Micromechanical devices
Micromirrors
Mirrors
Optical attenuators
Optical fiber devices
Optical losses
Optical reflection

Access to Document

10.1109/OMEMS.2003.1233507

Cite this

Lim, T. S., Ji, C. H., Oh, C. H., Yee, Y., & Bu, J. U. (2003). Electrostatic MEMS variable optical attenuator with folded micromirror. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 143-144). [1233507] (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233507

@inproceedings{673274e010bd4d6e9a82de6ed794fc4e,

title = "Electrostatic MEMS variable optical attenuator with folded micromirror",

abstract = "A reflection type VOA with folded micromirror was designed and fabricated. The proposed mirror structure can reduce the size of device by parallel alignment of the two fibers. Lensed fibers are used for high coupling efficiency and ease of assembly. The initial insertion loss is about 0.6 dB and the maximum attenuation is about 30 dB. The switching time of the fabricated VOA is about 1 ms.",

keywords = "Assembly, Electrostatics, Insertion loss, Micromechanical devices, Micromirrors, Mirrors, Optical attenuators, Optical fiber devices, Optical losses, Optical reflection",

author = "Lim, {Tae Sun} and Ji, {Chang Hyeon} and Oh, {Chang Hoon} and Youngjoo Yee and Bu, {Jong Uk}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; null ; Conference date: 18-08-2003 Through 21-08-2003",

year = "2003",

doi = "10.1109/OMEMS.2003.1233507",

language = "English",

series = "2003 IEEE/LEOS International Conference on Optical MEMS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "143--144",

booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",

}

Lim, TS, Ji, CH, Oh, CH, Yee, Y & Bu, JU 2003, Electrostatic MEMS variable optical attenuator with folded micromirror. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233507, 2003 IEEE/LEOS International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers Inc., pp. 143-144, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 18/08/03. https://doi.org/10.1109/OMEMS.2003.1233507

Electrostatic MEMS variable optical attenuator with folded micromirror. / Lim, Tae Sun; Ji, Chang Hyeon; Oh, Chang Hoon et al.

2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. p. 143-144 1233507 (2003 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Electrostatic MEMS variable optical attenuator with folded micromirror

AU - Lim, Tae Sun

AU - Ji, Chang Hyeon

AU - Oh, Chang Hoon

AU - Yee, Youngjoo

AU - Bu, Jong Uk

PY - 2003

Y1 - 2003

N2 - A reflection type VOA with folded micromirror was designed and fabricated. The proposed mirror structure can reduce the size of device by parallel alignment of the two fibers. Lensed fibers are used for high coupling efficiency and ease of assembly. The initial insertion loss is about 0.6 dB and the maximum attenuation is about 30 dB. The switching time of the fabricated VOA is about 1 ms.

AB - A reflection type VOA with folded micromirror was designed and fabricated. The proposed mirror structure can reduce the size of device by parallel alignment of the two fibers. Lensed fibers are used for high coupling efficiency and ease of assembly. The initial insertion loss is about 0.6 dB and the maximum attenuation is about 30 dB. The switching time of the fabricated VOA is about 1 ms.

KW - Assembly

KW - Electrostatics

KW - Insertion loss

KW - Micromechanical devices

KW - Micromirrors

KW - Mirrors

KW - Optical attenuators

KW - Optical fiber devices

KW - Optical losses

KW - Optical reflection

UR - http://www.scopus.com/inward/record.url?scp=2942692910&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2003.1233507

DO - 10.1109/OMEMS.2003.1233507

M3 - Conference contribution

AN - SCOPUS:2942692910

T3 - 2003 IEEE/LEOS International Conference on Optical MEMS

SP - 143

EP - 144

BT - 2003 IEEE/LEOS International Conference on Optical MEMS

PB - Institute of Electrical and Electronics Engineers Inc.

Y2 - 18 August 2003 through 21 August 2003

ER -

Electrostatic MEMS variable optical attenuator with folded micromirror

Abstract

Publication series

Conference

Keywords

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