Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer

Jun Ho Kim, Haesoo Jeong, Seung Ki Lee, Chang Hyeon Ji, Jae Hyoung Park

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


In this paper, we present an electromagnetically actuated two-axis scanning micromirror with large aperture and tilting angle for laser pointing applications. The two-axis micromirror with the plate size of 3 mm in diameter was realized using gimbaled single crystal silicon with a single-turn electroplated copper coil, and it was assembled with permanent magnets forming radial magnetic field. The micromirror was fabricated on SiOG (Silicon on Glass) wafer using 4 photolithography masks. The permanent magnet assembly composed of a cylindrical and a ring-type magnet was designed to optimize the radial magnetic field, and thus maximize the torque on the coil. Three different magnet assemblies were applied to the fabricated micromirror in order to verify the design. Horizontal resonance frequency of the fabricated micromirror was measured 1.421 kHz and vertical resonant frequency was 396 Hz. The vertical scan angle was 16.87°, 26.32° and 22.61° with the cylindrical magnet diameter of 2.6, 4.0 and 4.8 mm, respectively, at 60 Hz sinusoidal input of 640 mApp. For horizontal scan, maximum scan angle of 24.45° was obtained at 48 mApp input signal in resonance mode. In addition, the temperature distribution on the micromirror surface was measured with the applied current to the coil.

Original languageEnglish
Pages (from-to)2075-2085
Number of pages11
JournalMicrosystem Technologies
Issue number6
StatePublished - 1 Jun 2017

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Publisher Copyright:
© 2016, Springer-Verlag Berlin Heidelberg.


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