Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications

J. H. Kim; S. W. Lee; H. S. Jeong; S. K. Lee; C. H. Ji; J. H. Park

doi:10.1109/TRANSDUCERS.2015.7181054

Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications

J. H. Kim, S. W. Lee, H. S. Jeong, S. K. Lee, C. H. Ji, J. H. Park

Electronic and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

27 Scopus citations

Abstract

This paper presents electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for laser pointing applications such as LIDAR systems. The 2-axis micromirror with the plate size of 3 mm in diameter was fabricated using gimbaled single crystal silicon with a coil and assembled with permanent magnet forming radial magnetic field. The micromirror was realized on SiOG (Silicon on Glass) wafer using 4 photolithography masks and the magnet assembly was optimized to maximize the torque. Horizontal resonance frequency of manufactured micromirror was measured 1.421 kHz and vertical resonant frequency was 396 Hz. The vertical scan angle was 16.87°, 26.32° and 22.61 ° with the cylindrical magnet diameter of 2.6 mm, 4.0 mm and 4.8 mm respectively. Horizontal maximum scan angle was 24.45° using a cylindrical magnet with the diameter of 4.0 mm. Proposed 2-axial electromagnetically actuated large size micromirror is expected to be applicable to LIDAR system because it can handle high power laser and fast 2-dimensional scanning.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	839-842
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181054
State	Published - 5 Aug 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: 21 Jun 2015 → 25 Jun 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	21/06/15 → 25/06/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

Electromagnetically actuated micromirror
LIDAR
SiOG (Silicon On Glass) wafer

Access to Document

10.1109/TRANSDUCERS.2015.7181054

Cite this

Kim, J. H., Lee, S. W., Jeong, H. S., Lee, S. K., Ji, C. H., & Park, J. H. (2015). Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 839-842). Article 7181054 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181054

Kim, J. H. ; Lee, S. W. ; Jeong, H. S. et al. / Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 839-842 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

@inproceedings{76e56fa31b534ef58809b42df57800f5,

title = "Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications",

abstract = "This paper presents electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for laser pointing applications such as LIDAR systems. The 2-axis micromirror with the plate size of 3 mm in diameter was fabricated using gimbaled single crystal silicon with a coil and assembled with permanent magnet forming radial magnetic field. The micromirror was realized on SiOG (Silicon on Glass) wafer using 4 photolithography masks and the magnet assembly was optimized to maximize the torque. Horizontal resonance frequency of manufactured micromirror was measured 1.421 kHz and vertical resonant frequency was 396 Hz. The vertical scan angle was 16.87°, 26.32° and 22.61 ° with the cylindrical magnet diameter of 2.6 mm, 4.0 mm and 4.8 mm respectively. Horizontal maximum scan angle was 24.45° using a cylindrical magnet with the diameter of 4.0 mm. Proposed 2-axial electromagnetically actuated large size micromirror is expected to be applicable to LIDAR system because it can handle high power laser and fast 2-dimensional scanning.",

keywords = "Electromagnetically actuated micromirror, LIDAR, SiOG (Silicon On Glass) wafer",

author = "Kim, {J. H.} and Lee, {S. W.} and Jeong, {H. S.} and Lee, {S. K.} and Ji, {C. H.} and Park, {J. H.}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",

year = "2015",

month = aug,

day = "5",

doi = "10.1109/TRANSDUCERS.2015.7181054",

language = "English",

series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "839--842",

booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",

}

Kim, JH, Lee, SW, Jeong, HS, Lee, SK, Ji, CH & Park, JH 2015, Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181054, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 839-842, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 21/06/15. https://doi.org/10.1109/TRANSDUCERS.2015.7181054

Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications. / Kim, J. H.; Lee, S. W.; Jeong, H. S. et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 839-842 7181054 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications

AU - Kim, J. H.

AU - Lee, S. W.

AU - Jeong, H. S.

AU - Lee, S. K.

AU - Ji, C. H.

AU - Park, J. H.

PY - 2015/8/5

Y1 - 2015/8/5

N2 - This paper presents electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for laser pointing applications such as LIDAR systems. The 2-axis micromirror with the plate size of 3 mm in diameter was fabricated using gimbaled single crystal silicon with a coil and assembled with permanent magnet forming radial magnetic field. The micromirror was realized on SiOG (Silicon on Glass) wafer using 4 photolithography masks and the magnet assembly was optimized to maximize the torque. Horizontal resonance frequency of manufactured micromirror was measured 1.421 kHz and vertical resonant frequency was 396 Hz. The vertical scan angle was 16.87°, 26.32° and 22.61 ° with the cylindrical magnet diameter of 2.6 mm, 4.0 mm and 4.8 mm respectively. Horizontal maximum scan angle was 24.45° using a cylindrical magnet with the diameter of 4.0 mm. Proposed 2-axial electromagnetically actuated large size micromirror is expected to be applicable to LIDAR system because it can handle high power laser and fast 2-dimensional scanning.

AB - This paper presents electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for laser pointing applications such as LIDAR systems. The 2-axis micromirror with the plate size of 3 mm in diameter was fabricated using gimbaled single crystal silicon with a coil and assembled with permanent magnet forming radial magnetic field. The micromirror was realized on SiOG (Silicon on Glass) wafer using 4 photolithography masks and the magnet assembly was optimized to maximize the torque. Horizontal resonance frequency of manufactured micromirror was measured 1.421 kHz and vertical resonant frequency was 396 Hz. The vertical scan angle was 16.87°, 26.32° and 22.61 ° with the cylindrical magnet diameter of 2.6 mm, 4.0 mm and 4.8 mm respectively. Horizontal maximum scan angle was 24.45° using a cylindrical magnet with the diameter of 4.0 mm. Proposed 2-axial electromagnetically actuated large size micromirror is expected to be applicable to LIDAR system because it can handle high power laser and fast 2-dimensional scanning.

KW - Electromagnetically actuated micromirror

KW - LIDAR

KW - SiOG (Silicon On Glass) wafer

UR - http://www.scopus.com/inward/record.url?scp=84955503111&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2015.7181054

DO - 10.1109/TRANSDUCERS.2015.7181054

M3 - Conference contribution

AN - SCOPUS:84955503111

T3 - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

SP - 839

EP - 842

BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Y2 - 21 June 2015 through 25 June 2015

ER -

Kim JH, Lee SW, Jeong HS, Lee SK, Ji CH, Park JH. Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 839-842. 7181054. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7181054

Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for lidar applications

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

Fingerprint

Cite this