Electromagnetic biaxial vector scanner using radial magnetic field

Aleum Han, Ah Ran Cho, Suna Ju, Si Hong Ahn, Jong Uk Bu, Chang Hyeon Ji

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

We present an electromagnetic biaxial vector-graphic scanning micromirror. In contrast to conventional electromagnetic actuators using linear magnetic field, proposed device utilizes a radial magnetic field and uniquely designed current paths to enable the 2 degree-of-freedom scanning motion. As the radial field is generated by concentrically assembled magnets placed under the scanner die, large driving torque can be generated without the aid of hermetic packaging and relatively small device volume can be achieved. Mechanical half scan angle of 6.43° and 4.20° have been achieved at DC current of 250mA and 350mA for horizontal and vertical scans, respectively. Forced actuation along both scan axes has been realized by feedback control.

Original languageEnglish
Pages (from-to)15813-15821
Number of pages9
JournalOptics Express
Volume24
Issue number14
DOIs
StatePublished - 11 Jul 2016

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