We present an electromagnetic biaxial vector-graphic scanning micromirror. In contrast to conventional electromagnetic actuators using linear magnetic field, proposed device utilizes a radial magnetic field and uniquely designed current paths to enable the 2 degree-of-freedom scanning motion. As the radial field is generated by concentrically assembled magnets placed under the scanner die, large driving torque can be generated without the aid of hermetic packaging and relatively small device volume can be achieved. Mechanical half scan angle of 6.43° and 4.20° have been achieved at DC current of 250mA and 350mA for horizontal and vertical scans, respectively. Forced actuation along both scan axes has been realized by feedback control.
Bibliographical noteFunding Information:
Authors would like to thank Byung-Min Yoon, Seung Lee, and Taeha Kim of Senplus Inc., for the device fabrication and support with the characterization. This work was supported by the industrial technology innovation program (No.10047785) funded by the Ministry of Trade, Industry and Energy (MI, Korea), by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2014R1A1A2057721), by the EU Framework Program of the National Research Foundation (NRF) funded by the Ministry of Science, ICT and Future Planning (2014K1B1A1073720), and by the Center for Integrated Smart Sensors as GFP (CISS-2012M3A6A6054204).
©2016 Optical Society of America.