Electromagnetic biaxial microscanner with mechanical amplification at resonance

Ah Ran Cho, Aleum Han, Suna Ju, Haesoo Jeong, Jae Hyoung Park, Inhoi Kim, Jong Uk Bu, Chang Hyeon Ji

Research output: Contribution to journalArticlepeer-review

55 Scopus citations

Abstract

We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively.

Original languageEnglish
Pages (from-to)16792-16802
Number of pages11
JournalOptics Express
Volume23
Issue number13
DOIs
StatePublished - 2015

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