Electromagnetic 2D scanning micromirror for high definition laser projection displays

Suna Ju, Haesoo Jeong, Jae Hyoung Park, Jong Uk Bu, Chang Hyeon Ji

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico-projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2-mm-diameter micromirror, the maximum scan angle of 52° at 28.9 kHz and 33° at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm3. A prototype full-color pico-projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm3 volume.

Original languageEnglish
Article number8501997
Pages (from-to)2072-2075
Number of pages4
JournalIEEE Photonics Technology Letters
Volume30
Issue number23
DOIs
StatePublished - 1 Dec 2018

Keywords

  • Displays
  • Laser beam steering
  • Microactuators

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