Electromagnetic 2D scanning micromirror for high definition laser projection displays

Suna Ju; Haesoo Jeong; Jae Hyoung Park; Jong Uk Bu; Chang Hyeon Ji

doi:10.1109/LPT.2018.2877303

Electromagnetic 2D scanning micromirror for high definition laser projection displays

Suna Ju, Haesoo Jeong, Jae Hyoung Park, Jong Uk Bu, Chang Hyeon Ji

Electronic and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

29 Scopus citations

Abstract

We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico-projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2-mm-diameter micromirror, the maximum scan angle of 52° at 28.9 kHz and 33° at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm³. A prototype full-color pico-projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm³ volume.

Original language	English
Article number	8501997
Pages (from-to)	2072-2075
Number of pages	4
Journal	IEEE Photonics Technology Letters
Volume	30
Issue number	23
DOIs	https://doi.org/10.1109/LPT.2018.2877303
State	Published - 1 Dec 2018

Bibliographical note

Publisher Copyright:
© 1989-2012 IEEE.

Keywords

Displays
Laser beam steering
Microactuators

Access to Document

10.1109/LPT.2018.2877303

Cite this

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title = "Electromagnetic 2D scanning micromirror for high definition laser projection displays",

abstract = "We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico-projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2-mm-diameter micromirror, the maximum scan angle of 52° at 28.9 kHz and 33° at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm3. A prototype full-color pico-projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm3 volume.",

keywords = "Displays, Laser beam steering, Microactuators",

author = "Suna Ju and Haesoo Jeong and Park, {Jae Hyoung} and Bu, {Jong Uk} and Ji, {Chang Hyeon}",

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doi = "10.1109/LPT.2018.2877303",

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T1 - Electromagnetic 2D scanning micromirror for high definition laser projection displays

AU - Ju, Suna

AU - Jeong, Haesoo

AU - Park, Jae Hyoung

AU - Bu, Jong Uk

AU - Ji, Chang Hyeon

PY - 2018/12/1

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N2 - We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico-projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2-mm-diameter micromirror, the maximum scan angle of 52° at 28.9 kHz and 33° at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm3. A prototype full-color pico-projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm3 volume.

AB - We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico-projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2-mm-diameter micromirror, the maximum scan angle of 52° at 28.9 kHz and 33° at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm3. A prototype full-color pico-projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm3 volume.

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KW - Laser beam steering

KW - Microactuators

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Electromagnetic 2D scanning micromirror for high definition laser projection displays

Abstract

Bibliographical note

Keywords

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