@article{ef3c35fbbad44ff285f8952932bb27ab,
title = "Electromagnetic 2D scanning micromirror for high definition laser projection displays",
abstract = "We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico-projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2-mm-diameter micromirror, the maximum scan angle of 52° at 28.9 kHz and 33° at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm3. A prototype full-color pico-projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm3 volume.",
keywords = "Displays, Laser beam steering, Microactuators",
author = "Suna Ju and Haesoo Jeong and Park, {Jae Hyoung} and Bu, {Jong Uk} and Ji, {Chang Hyeon}",
note = "Funding Information: Manuscript received August 23, 2018; revised September 18, 2018; accepted October 16, 2018. Date of publication October 22, 2018; date of current version November 20, 2018. This work was supported in part by the Industrial Technology Innovation Program funded by the Ministry of Trade, Industry and Energy (MI, South Korea) under Grant 10047785, in part by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and Future Planning under Grant 2017R1A2B4007830, in part by the Basic Science Research Program through NRF funded by the Ministry of Education under Grant 2014R1A1A2057721, in part by the Space Core Technology Development Program through NRF funded by the Ministry of Science, ICT and Future Planning under Grant 2013M1A3A3A02042410, and in part by NRF funded by the Ministry of Science, ICT and Future Planning of 2015 under Grant 2014K1B1A1073720. (Suna Ju and Haesoo Jeong contributed equally to this work.) (Corresponding author: Chang-Hyeon Ji.) S. Ju and C.-H. Ji are with the Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, South Korea (e-mail: cji@ewha.ac.kr). Publisher Copyright: {\textcopyright} 1989-2012 IEEE.",
year = "2018",
month = dec,
day = "1",
doi = "10.1109/LPT.2018.2877303",
language = "English",
volume = "30",
pages = "2072--2075",
journal = "IEEE Photonics Technology Letters",
issn = "1041-1135",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "23",
}