Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through facing targets co-sputtering system

Dae Hyun Kim; Woo Jae Kim; Sang Joon Park; Hyung Wook Choi; Kyung Hwan Kim

doi:10.1016/j.surfcoat.2010.08.014

Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through facing targets co-sputtering system

Dae Hyun Kim, Woo Jae Kim, Sang Joon Park, Hyung Wook Choi, Kyung Hwan Kim

Department of Chemical Engineering & Materials Science

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

The Indium Zinc Tin Oxide (IZTO) thin films for use as a transparent electrode in flexible display were deposited on polycarbonate (PC) and polyethersulfone (PES) and glass substrates at room temperature by facing targets sputtering (FTS). When two sheets of targets are installed on an FTS system, one of target is IZO and other is ITO. As a result, we could prepare the IZTO thin films with the resistivity of under 10^-4 [Ωcm] and IZTO thin films deposited on PC, PES and glass substrate showed an average transmittance over 80% in visible range (400-800nm) in all IZTO thin films except for IZTO thin film that was deposited in a filled chamber with pure Ar gas.

Original language	English
Pages (from-to)	S324-S327
Journal	Surface and Coatings Technology
Volume	205
Issue number	SUPPL. 1
DOIs	https://doi.org/10.1016/j.surfcoat.2010.08.014
State	Published - 25 Dec 2010

Keywords

FTS
IZTO
PC
PES

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10.1016/j.surfcoat.2010.08.014

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title = "Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through facing targets co-sputtering system",

abstract = "The Indium Zinc Tin Oxide (IZTO) thin films for use as a transparent electrode in flexible display were deposited on polycarbonate (PC) and polyethersulfone (PES) and glass substrates at room temperature by facing targets sputtering (FTS). When two sheets of targets are installed on an FTS system, one of target is IZO and other is ITO. As a result, we could prepare the IZTO thin films with the resistivity of under 10-4 [Ωcm] and IZTO thin films deposited on PC, PES and glass substrate showed an average transmittance over 80% in visible range (400-800nm) in all IZTO thin films except for IZTO thin film that was deposited in a filled chamber with pure Ar gas.",

keywords = "FTS, IZTO, PC, PES",

author = "Kim, {Dae Hyun} and Kim, {Woo Jae} and Park, {Sang Joon} and Choi, {Hyung Wook} and Kim, {Kyung Hwan}",

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TY - JOUR

T1 - Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through facing targets co-sputtering system

AU - Kim, Dae Hyun

AU - Kim, Woo Jae

AU - Park, Sang Joon

AU - Choi, Hyung Wook

AU - Kim, Kyung Hwan

PY - 2010/12/25

Y1 - 2010/12/25

N2 - The Indium Zinc Tin Oxide (IZTO) thin films for use as a transparent electrode in flexible display were deposited on polycarbonate (PC) and polyethersulfone (PES) and glass substrates at room temperature by facing targets sputtering (FTS). When two sheets of targets are installed on an FTS system, one of target is IZO and other is ITO. As a result, we could prepare the IZTO thin films with the resistivity of under 10-4 [Ωcm] and IZTO thin films deposited on PC, PES and glass substrate showed an average transmittance over 80% in visible range (400-800nm) in all IZTO thin films except for IZTO thin film that was deposited in a filled chamber with pure Ar gas.

AB - The Indium Zinc Tin Oxide (IZTO) thin films for use as a transparent electrode in flexible display were deposited on polycarbonate (PC) and polyethersulfone (PES) and glass substrates at room temperature by facing targets sputtering (FTS). When two sheets of targets are installed on an FTS system, one of target is IZO and other is ITO. As a result, we could prepare the IZTO thin films with the resistivity of under 10-4 [Ωcm] and IZTO thin films deposited on PC, PES and glass substrate showed an average transmittance over 80% in visible range (400-800nm) in all IZTO thin films except for IZTO thin film that was deposited in a filled chamber with pure Ar gas.

KW - FTS

KW - IZTO

KW - PC

KW - PES

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U2 - 10.1016/j.surfcoat.2010.08.014

DO - 10.1016/j.surfcoat.2010.08.014

M3 - Article

AN - SCOPUS:78649940482

SN - 0257-8972

VL - 205

SP - S324-S327

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - SUPPL. 1

ER -

Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through facing targets co-sputtering system

Abstract

Keywords

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