Efficient Feature Selection-Based on Random Forward Search for Virtual Metrology Modeling

Engineering

• Feature Extraction 100%
• Selection Method 60%
• Process Parameter 40%
• Semiconductor Manufacturing 40%
• Dimensionality 40%
• Process Measurement 40%
• Experimental Result 20%
• Great Number 20%
• Essential Requirement 20%
• Wafer Quality 20%
• Process Equipment 20%
• Relevant Variable 20%
• Computational Cost 20%
• Quality Control 20%