Effects of P on amorphous chemical vapor deposition Ru-P alloy films for Cu interconnect liner applications

  • Jinhong Shin
  • , Hyun Woo Kim
  • , Kyriacos Agapiou
  • , Richard A. Jones
  • , Gyeong S. Hwang
  • , John G. Ekerdt

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

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