Effect of surface kinetics on the step coverage during chemical vapor deposition

Gyeong Soon Hwang, Sang Heup Moon, Suk Woo Nam, Chee Burm Shin

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of surface kinetics on the step coverage during chemical vapor deposition'. Together they form a unique fingerprint.

Engineering

Material Science