Effect of indium on phase-change characteristics and local chemical states of In-Ge-Sb-Te alloys

H. J. Shin, Youn Seon Kang, Anass Benayad, Ki Hong Kim, Y. M. Lee, M. C. Jung, Tae Yon Lee, Dong Seok Suh, Kijoon H.P. Kim, Cheolkyu Kim, Yoonho Khang

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Abstract

We introduce single-phase In-Ge-Sb-Te (IGST) quaternary thin film (fcc structure when crystallized) deposited by cosputtering from Ge2 Sb2 Te5 (GST) and In3 Sb1 Te 2 targets. This film, compared with the GST ternary system, provides a significant increase of amorphous-to-crystalline transformation temperature. High-resolution x-ray photoelectron spectroscopy (HRXPS) revealed that, with increasing In amounts, the Sb 4d and Ge 3d core peaks shift toward lower binding energies (BEs), with negligible changes in spectral linewidths, whereas the In 4d and Te 4d core peaks show insignificant changes in BEs. HRXPS interpretation suggests that the Na site in IGST can be occupied by Te, Sb, In, and vacancy, whereas in GST it is occupied only by Te.

Original languageEnglish
Article number021905
JournalApplied Physics Letters
Volume93
Issue number2
DOIs
StatePublished - 14 Jul 2008

Bibliographical note

Funding Information:
Y.M.L., M.-C.J., and H.J.S. would like to acknowledge the financial support of the Korea Research Foundation grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-351-C00011).

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