@inproceedings{0d6fe842ff394dddb8609a39d87e10fc,
title = "Dual-axis electromagnetic scanning micromirror using radial magnetic field",
abstract = "This paper presents the design, fabrication and measurement results of a dual-axis electromagnetic scanning micromirror utilizing radial magnetic field. The scanner is comprised of a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, assembled passively above a concentric permanent magnet assembly. Proposed scanner utilizes the radial magnetic field rather than using the magnetic field oriented 45° to the horizontal and vertical scan axes to achieve a biaxial magnetic actuation[1,2]. Forced actuation of the gimbal and resonant actuation of the micromirror provide slow vertical scan and fast horizontal scan respectively. A dual-axis scanner with maximum scan angle of 16.1°, mirror size of 1.5mm in diameter, and resonant frequency of 19.7kHz is reported.",
author = "Ji, {Chang Hyeon} and Ahn, {Si Hong} and Song, {Ki Chang} and Yoon, {Hyoung Kil} and Moongoo Choi and Kim, {Sang Cheon} and Bu, {Jong Uk}",
year = "2006",
language = "English",
isbn = "0780394755",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "32--35",
booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems",
note = "19th IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 22-01-2006 Through 26-01-2006",
}