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Dopant-segregated schottky source/drain FinFET with a NiSi FUSI gate and reduced leakage current

  • Sung Jin Choi
  • , Jin Woo Han
  • , Sungho Kim
  • , Dong Il Moon
  • , Moongyu Jang
  • , Yang Kyu Choi

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

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