Displays, Sensors and MEMS - MEMS Sensors

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	761
Number of pages	1
Journal	Technical Digest - International Electron Devices Meeting, IEDM
State	Published - 2003
Event	IEEE International Electron Devices Meeting - Washington, DC, United States Duration: 8 Dec 2003 → 10 Dec 2003

Cite this

@article{85da564559dd4bc5aa4b739b9993a103,

title = "Displays, Sensors and MEMS - MEMS Sensors",

author = "Lee, \{Luke P.\} and Benedetto Vigna",

year = "2003",

language = "English",

pages = "761",

journal = "Technical Digest - International Electron Devices Meeting, IEDM",

issn = "0163-1918",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "IEEE International Electron Devices Meeting ; Conference date: 08-12-2003 Through 10-12-2003",

}

TY - JOUR

T1 - Displays, Sensors and MEMS - MEMS Sensors

AU - Lee, Luke P.

AU - Vigna, Benedetto

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/17644443272

M3 - Conference article

AN - SCOPUS:17644443272

SN - 0163-1918

SP - 761

JO - Technical Digest - International Electron Devices Meeting, IEDM

JF - Technical Digest - International Electron Devices Meeting, IEDM

T2 - IEEE International Electron Devices Meeting

Y2 - 8 December 2003 through 10 December 2003

ER -