Displays, Sensors and MEMS - MEMS Sensors

Luke P. Lee, Benedetto Vigna

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Pages (from-to)761
Number of pages1
JournalTechnical Digest - International Electron Devices Meeting, IEDM
StatePublished - 2003
EventIEEE International Electron Devices Meeting - Washington, DC, United States
Duration: 8 Dec 200310 Dec 2003

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