Original language | English |
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Pages (from-to) | 761 |
Number of pages | 1 |
Journal | Technical Digest - International Electron Devices Meeting, IEDM |
State | Published - 2003 |
Event | IEEE International Electron Devices Meeting - Washington, DC, United States Duration: 8 Dec 2003 → 10 Dec 2003 |
Displays, Sensors and MEMS - MEMS Sensors
Luke P. Lee, Benedetto Vigna
Research output: Contribution to journal › Conference article › peer-review