@inproceedings{def94f0e822d4e40ad4e236a73ded746,
title = "Diamond shaped frame supported electrostatic scanning micromirror",
abstract = "This paper presents the design, fabrication and measurement of an electrostatic scanning micromirror having a diaphragm mirror plate supported by an array of diamond shaped frame structures. Instead of supporting the diaphragm mirror of different material with stiff rim structure at the circumference, the diaphragm mirror plate and the frame structure are fabricated monolithically in the same layer of single-crystal-silicon[1]. The scanning micromirror with 10μm-thick diaphragm mirror plate, having a planar dimension of 1.5×1.5mm2, supported by an array of 110μm-thick rhombic stiffening frame, was fabricated and tested. Mechanical deflection angle of 8.5° at resonance frequency of 19.55kHz and 44% reduction of dynamic deformation[2], in comparison to the conventional rectangular parallelepiped micromirror, were obtained.",
keywords = "Dynamic deformation, Electrostatic actuation, Scanning micromirror",
author = "Ji, {Chang Hyeon} and Kim, {Seong Hyok} and Youngjoo Yee and Moongoo Choi and Kim, {Sang Cheon} and Lee, {See Hyung} and Bu, {Jong Uk}",
year = "2005",
language = "English",
isbn = "0780389948",
series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",
pages = "992--995",
booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",
note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}