Design optimization of a 6.4 mm-diameter electromagnetic 2D scanning micromirror

Sung Yoon Kang; Jae Hyoung Park; Chang Hyeon Ji

doi:10.1364/OE.395903

Design optimization of a 6.4 mm-diameter electromagnetic 2D scanning micromirror

Sung Yoon Kang, Jae Hyoung Park, Chang Hyeon Ji

Electronic and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

We present the design optimization, fabrication, and analysis of an electromagnetic biaxial scanning micromirror with 6.4 mm-diameter. The scanner is composed of a micromirror supported by two concentric gimbal structures with unique single turn coil. A cylindrical permanent magnet assembly is placed under the micromirror to provide a radial magnetic field for actuation. Lumped element model parameters and magnetic circuit have been optimized to maximize the driving torque. Fabricated micromirror has been actuated at 300 Hz and 1,010 Hz and maximum optical scan angle of 25.6° and 35.3° have been obtained for the vertical and horizontal scans, respectively. Crosstalk during the actuation has been analyzed, and improved models have been proposed to reduce the crosstalk.

Original language	English
Pages (from-to)	31272-31286
Number of pages	15
Journal	Optics Express
Volume	28
Issue number	21
DOIs	https://doi.org/10.1364/OE.395903
State	Published - 12 Oct 2020

Bibliographical note

Funding Information:
Ministry of Science, ICT and Future Planning (2017R1A2B4007830, CISS-2012M3A6A6054204); Ministry of Science and ICT, South Korea (2019M3C1B8090805).

Publisher Copyright:
© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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title = "Design optimization of a 6.4 mm-diameter electromagnetic 2D scanning micromirror",

abstract = "We present the design optimization, fabrication, and analysis of an electromagnetic biaxial scanning micromirror with 6.4 mm-diameter. The scanner is composed of a micromirror supported by two concentric gimbal structures with unique single turn coil. A cylindrical permanent magnet assembly is placed under the micromirror to provide a radial magnetic field for actuation. Lumped element model parameters and magnetic circuit have been optimized to maximize the driving torque. Fabricated micromirror has been actuated at 300 Hz and 1,010 Hz and maximum optical scan angle of 25.6° and 35.3° have been obtained for the vertical and horizontal scans, respectively. Crosstalk during the actuation has been analyzed, and improved models have been proposed to reduce the crosstalk.",

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N2 - We present the design optimization, fabrication, and analysis of an electromagnetic biaxial scanning micromirror with 6.4 mm-diameter. The scanner is composed of a micromirror supported by two concentric gimbal structures with unique single turn coil. A cylindrical permanent magnet assembly is placed under the micromirror to provide a radial magnetic field for actuation. Lumped element model parameters and magnetic circuit have been optimized to maximize the driving torque. Fabricated micromirror has been actuated at 300 Hz and 1,010 Hz and maximum optical scan angle of 25.6° and 35.3° have been obtained for the vertical and horizontal scans, respectively. Crosstalk during the actuation has been analyzed, and improved models have been proposed to reduce the crosstalk.

AB - We present the design optimization, fabrication, and analysis of an electromagnetic biaxial scanning micromirror with 6.4 mm-diameter. The scanner is composed of a micromirror supported by two concentric gimbal structures with unique single turn coil. A cylindrical permanent magnet assembly is placed under the micromirror to provide a radial magnetic field for actuation. Lumped element model parameters and magnetic circuit have been optimized to maximize the driving torque. Fabricated micromirror has been actuated at 300 Hz and 1,010 Hz and maximum optical scan angle of 25.6° and 35.3° have been obtained for the vertical and horizontal scans, respectively. Crosstalk during the actuation has been analyzed, and improved models have been proposed to reduce the crosstalk.

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Design optimization of a 6.4 mm-diameter electromagnetic 2D scanning micromirror

Abstract

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