Design and fabrication of micromirror array with hidden joint structures

Chang Hyeon Ji, Yong Kweon Kim

Research output: Contribution to journalConference articlepeer-review


This paper describes the design and fabrication of surface-micromachined micromirror array with hidden joint structures. Instead of using elastic spring components, such as cantilevers, flexure beams, and torsion hinges, we have used joint structure composed of pin and staples to support the mirror plate. The position of the joint structure, under the mirror plate, makes large active surface area possible. Arrays of 100×110 μm2 sized micromirrors with two different staple shapes are designed and fabricated. These flexureless micromirrors are driven by electrostatic force between mirror plate and address electrode under it. As the mirror plate has discrete deflection angles the device is well suited for spatial light modulating purpose. Four-level metal structural layers and semi-cured photoresist sacrificial layers are used in the fabrication process and sacrificial layers are removed by dry release process using oxygen plasma. Performance characteristics are measured by applying voltage difference between the ground electrode, which contacts the mirror plate via support post, and an address electrode.

Original languageEnglish
Pages (from-to)71-77
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1998
EventProceedings of the 1998 Conference on Microelectronic Structures and MEMS for Optical Processing IV - Santa Clara, CA, USA
Duration: 21 Sep 199822 Sep 1998


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