Design and fabrication of magnetically driven micromirror with large angular deflection

Chana Hveon Ji, Yong Kweon Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this research we have designed and fabricated electromagnetically driven micromirror by combination of surface and bulk micromachining processes. Individual mirror plate and springs occupy relatively small area of 300×/300 mu/m2. To obtain flat mirror surface, bulk silicon of thickness ranging from 10 to 20 mu/m is used as a mirror plate. For the mirror plate to have substantial amount of angular deflection, aluminum is used as a spring material and crab-leg shaped spring is used.

Original languageEnglish
Title of host publicationDigest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages132-133
Number of pages2
ISBN (Electronic)4891140046, 9784891140045
DOIs
StatePublished - 2000
EventInternational Microprocesses and Nanotechnology Conference, MNC 2000 - Tokyo, Japan
Duration: 11 Jul 200013 Jul 2000

Publication series

NameDigest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000

Conference

ConferenceInternational Microprocesses and Nanotechnology Conference, MNC 2000
Country/TerritoryJapan
CityTokyo
Period11/07/0013/07/00

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