@inproceedings{54eb8f04ecf0485eb3a1a97dced815a7,
title = "Design and fabrication of magnetically driven micromirror with large angular deflection",
abstract = "In this research we have designed and fabricated electromagnetically driven micromirror by combination of surface and bulk micromachining processes. Individual mirror plate and springs occupy relatively small area of 300×/300 mu/m2. To obtain flat mirror surface, bulk silicon of thickness ranging from 10 to 20 mu/m is used as a mirror plate. For the mirror plate to have substantial amount of angular deflection, aluminum is used as a spring material and crab-leg shaped spring is used.",
author = "Ji, {Chana Hveon} and Kim, {Yong Kweon}",
year = "2000",
doi = "10.1109/IMNC.2000.872657",
language = "English",
series = "Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "132--133",
booktitle = "Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000",
note = "International Microprocesses and Nanotechnology Conference, MNC 2000 ; Conference date: 11-07-2000 Through 13-07-2000",
}