Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring

Chang Hyeon Ji, Yong Kweon Kim, Gyo Bum Chung

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

We have designed and fabricated an electromagnetic micromirror with a flat mirror plate capable of large angular deflection. Single-crystal silicon is used as a mirror plate to obtain an optically flat reflective surface. By a combination of surface and bulk micromachining processes, the single-crystal silicon mirror plate is connected to the substrate via an aluminum spring, which occupies a relatively small area without compromising the compliance. The proposed fabrication process can be applied to the fabrication of devices in which a flat moving part is supported by a compliant spring structure. Nickel electroplated onto the mirror plate enables a mirror rotation angle of up to 84.8° by applying an external magnetic field vertical to the substrate. This designed structure can be used individually or as an array in microphotonic applications.

Original languageEnglish
Pages (from-to)7138-7141
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number12 B
DOIs
StatePublished - Dec 2000

Keywords

  • Bulk micro-machining
  • DRIE
  • Electromagnetic micromirror
  • MOEMS
  • Parylene C
  • Surface micromachining

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