Abstract
We have designed and fabricated an electromagnetic micromirror with a flat mirror plate capable of large angular deflection. Single-crystal silicon is used as a mirror plate to obtain an optically flat reflective surface. By a combination of surface and bulk micromachining processes, the single-crystal silicon mirror plate is connected to the substrate via an aluminum spring, which occupies a relatively small area without compromising the compliance. The proposed fabrication process can be applied to the fabrication of devices in which a flat moving part is supported by a compliant spring structure. Nickel electroplated onto the mirror plate enables a mirror rotation angle of up to 84.8° by applying an external magnetic field vertical to the substrate. This designed structure can be used individually or as an array in microphotonic applications.
Original language | English |
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Pages (from-to) | 7138-7141 |
Number of pages | 4 |
Journal | Japanese Journal of Applied Physics |
Volume | 39 |
Issue number | 12 B |
DOIs | |
State | Published - Dec 2000 |
Keywords
- Bulk micro-machining
- DRIE
- Electromagnetic micromirror
- MOEMS
- Parylene C
- Surface micromachining