Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring

Chang Hyeon Ji; Yong Kweon Kim; Bum Kyoo Choi

doi:10.1109/OMEMS.2000.879644

Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring

Chang Hyeon Ji, Yong Kweon Kim, Bum Kyoo Choi

Electronic and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

8 Scopus citations

Abstract

We have designed and fabricated a magnetically actuated micromirror device. The fabricated device can be used in optical switching applications that require large angular deflection of the reflected beams. The fabrication process is a combination of surface and bulk micromachining, which can be characterized by the capability to form large flat bulk silicon structure and flexible metal spring. The fabrication process can be utilized in the fabrication of devices which require large flat structure and reduced energy in actuation.

Original language	English
Title of host publication	2000 IEEE/LEOS International Conference on Optical MEMS
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	97-98
Number of pages	2
ISBN (Electronic)	0780362578, 9780780362574
DOIs	https://doi.org/10.1109/OMEMS.2000.879644
State	Published - 2000
Event	IEEE/LEOS International Conference on Optical MEMS, OPTMEMS 2000 - Kauai, United States Duration: 21 Aug 2000 → 24 Aug 2000

Publication series

Name	2000 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference	IEEE/LEOS International Conference on Optical MEMS, OPTMEMS 2000
Country/Territory	United States
City	Kauai
Period	21/08/00 → 24/08/00

Bibliographical note

Publisher Copyright:
© 2000 IEEE.

Access to Document

10.1109/OMEMS.2000.879644

Cite this

Ji, C. H., Kim, Y. K., & Choi, B. K. (2000). Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring. In 2000 IEEE/LEOS International Conference on Optical MEMS (pp. 97-98). Article 879644 (2000 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2000.879644

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title = "Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring",

abstract = "We have designed and fabricated a magnetically actuated micromirror device. The fabricated device can be used in optical switching applications that require large angular deflection of the reflected beams. The fabrication process is a combination of surface and bulk micromachining, which can be characterized by the capability to form large flat bulk silicon structure and flexible metal spring. The fabrication process can be utilized in the fabrication of devices which require large flat structure and reduced energy in actuation.",

author = "Ji, {Chang Hyeon} and Kim, {Yong Kweon} and Choi, {Bum Kyoo}",

note = "Publisher Copyright: {\textcopyright} 2000 IEEE.; IEEE/LEOS International Conference on Optical MEMS, OPTMEMS 2000 ; Conference date: 21-08-2000 Through 24-08-2000",

year = "2000",

doi = "10.1109/OMEMS.2000.879644",

language = "English",

series = "2000 IEEE/LEOS International Conference on Optical MEMS",

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Ji, CH, Kim, YK & Choi, BK 2000, Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring. in 2000 IEEE/LEOS International Conference on Optical MEMS., 879644, 2000 IEEE/LEOS International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers Inc., pp. 97-98, IEEE/LEOS International Conference on Optical MEMS, OPTMEMS 2000, Kauai, United States, 21/08/00. https://doi.org/10.1109/OMEMS.2000.879644

Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring. / Ji, Chang Hyeon; Kim, Yong Kweon; Choi, Bum Kyoo.
2000 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2000. p. 97-98 879644 (2000 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring

AU - Ji, Chang Hyeon

AU - Kim, Yong Kweon

AU - Choi, Bum Kyoo

PY - 2000

Y1 - 2000

N2 - We have designed and fabricated a magnetically actuated micromirror device. The fabricated device can be used in optical switching applications that require large angular deflection of the reflected beams. The fabrication process is a combination of surface and bulk micromachining, which can be characterized by the capability to form large flat bulk silicon structure and flexible metal spring. The fabrication process can be utilized in the fabrication of devices which require large flat structure and reduced energy in actuation.

AB - We have designed and fabricated a magnetically actuated micromirror device. The fabricated device can be used in optical switching applications that require large angular deflection of the reflected beams. The fabrication process is a combination of surface and bulk micromachining, which can be characterized by the capability to form large flat bulk silicon structure and flexible metal spring. The fabrication process can be utilized in the fabrication of devices which require large flat structure and reduced energy in actuation.

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BT - 2000 IEEE/LEOS International Conference on Optical MEMS

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE/LEOS International Conference on Optical MEMS, OPTMEMS 2000

Y2 - 21 August 2000 through 24 August 2000

ER -

Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring

Abstract

Publication series

Conference

Bibliographical note

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