Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring

Chang Hyeon Ji, Yong Kweon Kim, Bum Kyoo Choi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

8 Scopus citations

Abstract

We have designed and fabricated a magnetically actuated micromirror device. The fabricated device can be used in optical switching applications that require large angular deflection of the reflected beams. The fabrication process is a combination of surface and bulk micromachining, which can be characterized by the capability to form large flat bulk silicon structure and flexible metal spring. The fabrication process can be utilized in the fabrication of devices which require large flat structure and reduced energy in actuation.

Original languageEnglish
Title of host publication2000 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages97-98
Number of pages2
ISBN (Electronic)0780362578, 9780780362574
DOIs
StatePublished - 2000
EventIEEE/LEOS International Conference on Optical MEMS, OPTMEMS 2000 - Kauai, United States
Duration: 21 Aug 200024 Aug 2000

Publication series

Name2000 IEEE/LEOS International Conference on Optical MEMS

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMS, OPTMEMS 2000
Country/TerritoryUnited States
CityKauai
Period21/08/0024/08/00

Bibliographical note

Funding Information:
This research was supported by the Ministry of Science and Technology and the Ministry of Industry and Energy under Micromachine Technology Development Program and partly supported by the Brain Korea 21 Project.

Publisher Copyright:
© 2000 IEEE.

Fingerprint

Dive into the research topics of 'Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring'. Together they form a unique fingerprint.

Cite this