@inproceedings{1a83971018804b86a483bb7fcf2020b4,
title = "Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring",
abstract = "We have designed and fabricated a magnetically actuated micromirror device. The fabricated device can be used in optical switching applications that require large angular deflection of the reflected beams. The fabrication process is a combination of surface and bulk micromachining, which can be characterized by the capability to form large flat bulk silicon structure and flexible metal spring. The fabrication process can be utilized in the fabrication of devices which require large flat structure and reduced energy in actuation.",
author = "Ji, {Chang Hyeon} and Kim, {Yong Kweon} and Choi, {Bum Kyoo}",
note = "Funding Information: This research was supported by the Ministry of Science and Technology and the Ministry of Industry and Energy under Micromachine Technology Development Program and partly supported by the Brain Korea 21 Project. Publisher Copyright: {\textcopyright} 2000 IEEE.; null ; Conference date: 21-08-2000 Through 24-08-2000",
year = "2000",
doi = "10.1109/OMEMS.2000.879644",
language = "English",
series = "2000 IEEE/LEOS International Conference on Optical MEMS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "97--98",
booktitle = "2000 IEEE/LEOS International Conference on Optical MEMS",
}