Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment

V. N. Popok, S. V. Prasalovich, M. Samuelsson, E. E.B. Campbell

Research output: Contribution to journal › Article › peer-review

31 Scopus citations

Fingerprint

Dive into the research topics of 'Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment'. Together they form a unique fingerprint.

Material Science