Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment

V. N. Popok; S. V. Prasalovich; M. Samuelsson; E. E.B. Campbell

doi:10.1063/1.1518790

Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment

V. N. Popok, S. V. Prasalovich, M. Samuelsson, E. E.B. Campbell

Department of Physics

Research output: Contribution to journal › Article › peer-review

31 Scopus citations

Abstract

The description of design and capabilities of a cluster implantation and deposition apparatus was presented. A number of possible experimental methods to study cluster-surface collisions and modified substrate surfaces were discussed. The results on hillock formation under energetic cluster ion bombardment were presented.

Original language	English
Pages (from-to)	4283-4287
Number of pages	5
Journal	Review of Scientific Instruments
Volume	73
Issue number	12
DOIs	https://doi.org/10.1063/1.1518790
State	Published - Dec 2002

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title = "Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment",

abstract = "The description of design and capabilities of a cluster implantation and deposition apparatus was presented. A number of possible experimental methods to study cluster-surface collisions and modified substrate surfaces were discussed. The results on hillock formation under energetic cluster ion bombardment were presented.",

author = "Popok, \{V. N.\} and Prasalovich, \{S. V.\} and M. Samuelsson and Campbell, \{E. E.B.\}",

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AU - Popok, V. N.

AU - Prasalovich, S. V.

AU - Samuelsson, M.

AU - Campbell, E. E.B.

PY - 2002/12

Y1 - 2002/12

N2 - The description of design and capabilities of a cluster implantation and deposition apparatus was presented. A number of possible experimental methods to study cluster-surface collisions and modified substrate surfaces were discussed. The results on hillock formation under energetic cluster ion bombardment were presented.

AB - The description of design and capabilities of a cluster implantation and deposition apparatus was presented. A number of possible experimental methods to study cluster-surface collisions and modified substrate surfaces were discussed. The results on hillock formation under energetic cluster ion bombardment were presented.

UR - https://www.scopus.com/pages/publications/0036933104

U2 - 10.1063/1.1518790

DO - 10.1063/1.1518790

M3 - Article

AN - SCOPUS:0036933104

SN - 0034-6748

VL - 73

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EP - 4287

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 12

ER -

Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment

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