Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment

V. N. Popok, S. V. Prasalovich, M. Samuelsson, E. E.B. Campbell

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

Abstract

The description of design and capabilities of a cluster implantation and deposition apparatus was presented. A number of possible experimental methods to study cluster-surface collisions and modified substrate surfaces were discussed. The results on hillock formation under energetic cluster ion bombardment were presented.

Original languageEnglish
Pages (from-to)4283-4287
Number of pages5
JournalReview of Scientific Instruments
Volume73
Issue number12
DOIs
StatePublished - Dec 2002

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