Abstract
The description of design and capabilities of a cluster implantation and deposition apparatus was presented. A number of possible experimental methods to study cluster-surface collisions and modified substrate surfaces were discussed. The results on hillock formation under energetic cluster ion bombardment were presented.
Original language | English |
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Pages (from-to) | 4283-4287 |
Number of pages | 5 |
Journal | Review of Scientific Instruments |
Volume | 73 |
Issue number | 12 |
DOIs | |
State | Published - Dec 2002 |