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Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules
Tanzia Chowdhury, Romel Hidayat, Hye Lee Kim, Tirta Rona Mayangsari, Seongjae Cho, Sangjoon Park, Jongwan Jung, Won Jun Lee
Research output: Contribution to journal › Article › peer-review
7
Scopus
citations