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Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules

  • Tanzia Chowdhury
  • , Romel Hidayat
  • , Hye Lee Kim
  • , Tirta Rona Mayangsari
  • , Seongjae Cho
  • , Sangjoon Park
  • , Jongwan Jung
  • , Won Jun Lee

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

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