Demonstration of monolithic co-fabrication of Y 1 Ba 2 Cu 3 O 7-δ and CMOS devices on the same sapphire substrate

P. R. De La Houssaye, M. J. Burns, W. J. Ruby, S. D. Russell, S. R. Clayton, G. A. Garcia, L. P. Lee

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations
Original languageEnglish
Article number1009619
JournalDevice Research Conference - Conference Digest, DRC
VolumePart F146191
DOIs
StatePublished - 1993
Event51st Annual Device Research Conference, DRC 1993 - Santa Barbara, United States
Duration: 21 Jun 199323 Jun 1993

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