Dc plasma-enhanced chemical vapour deposition growth of carbon nanotubes and nanofibres: In situ spectroscopy and plasma current dependence

M. Jönsson; O. A. Nerushev; E. E.B. Campbell

doi:10.1007/s00339-007-3994-9

Dc plasma-enhanced chemical vapour deposition growth of carbon nanotubes and nanofibres: In situ spectroscopy and plasma current dependence

M. Jönsson, O. A. Nerushev, E. E.B. Campbell

Department of Physics

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14 Scopus citations

Abstract

Dc plasma-enhanced CVD growth of nanotubes and nanofibres is studied as a function of plasma power (3-40 W). The dependence of the nanotube/nanofibre morphology for growth on thin iron films and lithographically prepared individual nickel dots is investigated. In both cases, large differences in the morphology of the carbon nanostructures are observed as the plasma power is changed. In situ optical emission spectroscopy is used to obtain insight into the important parameters affecting the growth. The best growth results are found for intermediate plasma powers (15 W).

Original language	English
Pages (from-to)	261-267
Number of pages	7
Journal	Applied Physics A: Materials Science and Processing
Volume	88
Issue number	2
DOIs	https://doi.org/10.1007/s00339-007-3994-9
State	Published - Aug 2007

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abstract = "Dc plasma-enhanced CVD growth of nanotubes and nanofibres is studied as a function of plasma power (3-40 W). The dependence of the nanotube/nanofibre morphology for growth on thin iron films and lithographically prepared individual nickel dots is investigated. In both cases, large differences in the morphology of the carbon nanostructures are observed as the plasma power is changed. In situ optical emission spectroscopy is used to obtain insight into the important parameters affecting the growth. The best growth results are found for intermediate plasma powers (15 W).",

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AB - Dc plasma-enhanced CVD growth of nanotubes and nanofibres is studied as a function of plasma power (3-40 W). The dependence of the nanotube/nanofibre morphology for growth on thin iron films and lithographically prepared individual nickel dots is investigated. In both cases, large differences in the morphology of the carbon nanostructures are observed as the plasma power is changed. In situ optical emission spectroscopy is used to obtain insight into the important parameters affecting the growth. The best growth results are found for intermediate plasma powers (15 W).

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Dc plasma-enhanced chemical vapour deposition growth of carbon nanotubes and nanofibres: In situ spectroscopy and plasma current dependence

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