Cooling performance of micromachined self-oscillating reed actuators in heat transfer channels with integrated diagnostics

F. Herrault, P. A. Hidalgo, C. H. Ji, A. Glezer, M. G. Allen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

31 Scopus citations

Abstract

This paper presents heat transfer (HT) performance of small-scale MEMS-enhanced self-powered oscillating actuators for applications in highly-compact high-power air-cooled heat exchangers. Commercial air-cooled heat sinks are typically much larger than the systems they must cool due to large air-side thermal resistance. Our work is applying MEMS technologies to reduce this thermal resistance via the integration of small-scale oscillating actuators into small heat exchangers. Improved HT performance either yields smaller heat sinks or higher heat fluxes. These mm-scale actuators were built using MEMS manufacturing technologies such as laser micromachining, lamination, and/or metal patterning and etching. Conceptually, oscillating reeds inserted into the channels of an air-cooled heat sink induce small-scale motions in low-Reynolds number flows, which increases HT efficacy. Using MEMS-enhanced reed actuators, we experimentally demonstrated local HT enhancement up to 250% in microfabricated channels monitored by integrated temperature sensors.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages1217-1220
Number of pages4
DOIs
StatePublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 29 Jan 20122 Feb 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/TerritoryFrance
CityParis
Period29/01/122/02/12

Fingerprint

Dive into the research topics of 'Cooling performance of micromachined self-oscillating reed actuators in heat transfer channels with integrated diagnostics'. Together they form a unique fingerprint.

Cite this