Configurable 3D nanoscale high aspect ratio pillars for surface-enhanced Raman spectroscopy

Gang Logan Liu, Yang Kyu Choi, L. P. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Configurable Nanoscale-High-Aspect-Ratio-Pillar (NanoHARP) structures were fabricated by a batch process method. Silver thin films were deposited on the top of NanoHARP to form Raman scattering enhancing substrate. By alternating the NanoHARP fabrication recipe and silver thin film deposition thickness, the density as well as the dimensions of the surface matrix is able to be controlled within a wide range. The results of reflectance spectrum and low-temperature electrical conductivity measurements indicate the non-continuous corrugated Ag surface matrix was formed. The Ag-coated nanopillar structure was utilized as the substrate for Surface Enhanced Raman Spectroscopy (SERS) to detect 1nM Rhodamine 6G sample. The characteristic spectrum of Rhodamine 6G was identified successfully and the Raman signal enhancements were observed to vary within 3 orders of magnitude for different nanopillar structures, which is consistent with theoretical predictions. The controllability of the configurations of nanopillars during fabrication enables us to optimize the nano-structure substrate of SERS for specific biomolecules and thus facilitate the ultra-sensitive biomolecule detections.

Original languageEnglish
Title of host publication2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings
PublisherIEEE Computer Society
Number of pages3
ISBN (Electronic)0780379764
StatePublished - 2003
Event2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - San Francisco, United States
Duration: 12 Aug 200314 Aug 2003

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380


Conference2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003
Country/TerritoryUnited States
CitySan Francisco

Bibliographical note

Publisher Copyright:
© 2003 IEEE.


  • Corrugated surfaces
  • Fabrication
  • Molecular biophysics
  • Nanostructures
  • Raman scattering
  • Silver
  • Spectroscopy
  • Sputtering
  • Substrates
  • Thickness control


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