Fingerprint
Dive into the research topics of 'Chemical routes to ultra thin films for copper barriers and liners'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Chemical routes to ultra thin films for copper barriers and liners
Jinhong Shin, Hyun Woo Kim, Gyeong S. Hwang, John G. Ekerdt
Research output: Contribution to journal › Article › peer-review
15
Scopus
citations