Chemical routes to ultra thin films for copper barriers and liners

John Ekerdt, Jinhong Shin, Wyatt Winkenwerder, Hyun Woo Kim, Kelly Thom, Gyeong S. Hwang, Kyriacos Agapiou, Richard A. Jones

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Fingerprint

Dive into the research topics of 'Chemical routes to ultra thin films for copper barriers and liners'. Together they form a unique fingerprint.

Material Science

Chemistry