Characterization and applications of glassy barrier on polymeric microcavities

Asif Riaz, Ram P. Gandhiraman, Ivan K. Dimov, Lourdes Basabe-Desmonts, Antonio J. Ricco, Jens Ducrée, Stephen Daniels, Luke P. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper describes formation of a glassy barrier in long microcavities through gas phase reaction. The barrier is characterized as composed of oxides of silicon (SiOx). The SiOx barrier was grown in assembled elastomeric microfluidic devices and tested successfully for various applications.

Original languageEnglish
Title of host publicationProceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherChemical and Biological Microsystems Society
Pages223-225
Number of pages3
ISBN (Print)9780979806421
StatePublished - 2009
Event13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009 - Jeju, Korea, Republic of
Duration: 1 Nov 20095 Nov 2009

Publication series

NameProceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Conference

Conference13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009
Country/TerritoryKorea, Republic of
CityJeju
Period1/11/095/11/09

Keywords

  • Diffusion barrier
  • Hexamethyldisiloxane
  • Microfluidics
  • Plasma enhanced vapor deposition
  • Polydimethylsiloxane

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