Catalytic role of boron atoms in self-interstitial clustering in Si

Gyeong S. Hwang; William A. Goddard

doi:10.1063/1.1596729

Catalytic role of boron atoms in self-interstitial clustering in Si

Gyeong S. Hwang, William A. Goddard

Department of Chemical Engineering & Materials Science

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.

Original language	English
Pages (from-to)	1047-1049
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	5
DOIs	https://doi.org/10.1063/1.1596729
State	Published - 4 Aug 2003

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abstract = "The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.",

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AB - The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Catalytic role of boron atoms in self-interstitial clustering in Si

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