Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor

Jeong Yeon Hwang; Chang Hyeon Ji

doi:10.1109/TRANSDUCERS.2019.8808582

Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor

Jeong Yeon Hwang, Chang Hyeon Ji

Electronic and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper presents a new type of piezoelectrically actuated scanning micromirror using bulk PZT (lead zirconate titanate) plate and an integrated electromagnetic deflection angle sensor. Proposed actuation mechanism utilizes a commercially available bulk PZT plate attached to a silicon substrate using adhesive. Fabricated device is experimentally characterized and analyzed using finite element analysis. An optical scan angle of 45° at 28.4kHz has been achieved at 50V_pp square wave input. Moreover, a simple deflection angle sensing method using integrated coil and external permanent magnet has been proposed and verified.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1537-1540
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808582
State	Published - Jun 2019
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Bibliographical note

Funding Information:
This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1A2B4007830), and by the EU Framework program of the National Research Foundation (NRF) funded by the Ministry of Science, ICT & Future Planning (2014K1B1A1073720), and by the Center for Integrated Smart Sensor as GFP (CISS-2012M3A6A6054204).

Publisher Copyright:
© 2019 IEEE.

Keywords

Bulk PZT plate
Deflection angle sensor
MEMS scanning micromirror
Piezoelectric actuation

Access to Document

10.1109/TRANSDUCERS.2019.8808582

Cite this

Hwang, J. Y., & Ji, C. H. (2019). Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1537-1540). Article 8808582 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808582

Hwang, Jeong Yeon ; Ji, Chang Hyeon. / Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1537-1540 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

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abstract = "This paper presents a new type of piezoelectrically actuated scanning micromirror using bulk PZT (lead zirconate titanate) plate and an integrated electromagnetic deflection angle sensor. Proposed actuation mechanism utilizes a commercially available bulk PZT plate attached to a silicon substrate using adhesive. Fabricated device is experimentally characterized and analyzed using finite element analysis. An optical scan angle of 45° at 28.4kHz has been achieved at 50Vpp square wave input. Moreover, a simple deflection angle sensing method using integrated coil and external permanent magnet has been proposed and verified.",

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note = "Funding Information: This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1A2B4007830), and by the EU Framework program of the National Research Foundation (NRF) funded by the Ministry of Science, ICT & Future Planning (2014K1B1A1073720), and by the Center for Integrated Smart Sensor as GFP (CISS-2012M3A6A6054204). Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

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Hwang, JY & Ji, CH 2019, Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808582, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1537-1540, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808582

Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor. / Hwang, Jeong Yeon; Ji, Chang Hyeon.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1537-1540 8808582 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Hwang, Jeong Yeon

AU - Ji, Chang Hyeon

N1 - Funding Information: This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1A2B4007830), and by the EU Framework program of the National Research Foundation (NRF) funded by the Ministry of Science, ICT & Future Planning (2014K1B1A1073720), and by the Center for Integrated Smart Sensor as GFP (CISS-2012M3A6A6054204). Publisher Copyright: © 2019 IEEE.

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N2 - This paper presents a new type of piezoelectrically actuated scanning micromirror using bulk PZT (lead zirconate titanate) plate and an integrated electromagnetic deflection angle sensor. Proposed actuation mechanism utilizes a commercially available bulk PZT plate attached to a silicon substrate using adhesive. Fabricated device is experimentally characterized and analyzed using finite element analysis. An optical scan angle of 45° at 28.4kHz has been achieved at 50Vpp square wave input. Moreover, a simple deflection angle sensing method using integrated coil and external permanent magnet has been proposed and verified.

AB - This paper presents a new type of piezoelectrically actuated scanning micromirror using bulk PZT (lead zirconate titanate) plate and an integrated electromagnetic deflection angle sensor. Proposed actuation mechanism utilizes a commercially available bulk PZT plate attached to a silicon substrate using adhesive. Fabricated device is experimentally characterized and analyzed using finite element analysis. An optical scan angle of 45° at 28.4kHz has been achieved at 50Vpp square wave input. Moreover, a simple deflection angle sensing method using integrated coil and external permanent magnet has been proposed and verified.

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KW - Piezoelectric actuation

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M3 - Conference contribution

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T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

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BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Hwang JY, Ji CH. Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1537-1540. 8808582. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808582

Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor

Abstract

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Bibliographical note

Keywords

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