Abstract
This paper presents a new type of piezoelectrically actuated scanning micromirror using bulk PZT (lead zirconate titanate) plate and an integrated electromagnetic deflection angle sensor. Proposed actuation mechanism utilizes a commercially available bulk PZT plate attached to a silicon substrate using adhesive. Fabricated device is experimentally characterized and analyzed using finite element analysis. An optical scan angle of 45° at 28.4kHz has been achieved at 50Vpp square wave input. Moreover, a simple deflection angle sensing method using integrated coil and external permanent magnet has been proposed and verified.
Original language | English |
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Title of host publication | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1537-1540 |
Number of pages | 4 |
ISBN (Electronic) | 9781728120072 |
DOIs | |
State | Published - Jun 2019 |
Event | 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019 |
Publication series
Name | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
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Conference
Conference | 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
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Country/Territory | Germany |
City | Berlin |
Period | 23/06/19 → 27/06/19 |
Bibliographical note
Funding Information:This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1A2B4007830), and by the EU Framework program of the National Research Foundation (NRF) funded by the Ministry of Science, ICT & Future Planning (2014K1B1A1073720), and by the Center for Integrated Smart Sensor as GFP (CISS-2012M3A6A6054204).
Publisher Copyright:
© 2019 IEEE.
Keywords
- Bulk PZT plate
- Deflection angle sensor
- MEMS scanning micromirror
- Piezoelectric actuation