Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor

Jeong Yeon Hwang, Chang Hyeon Ji

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

This paper presents a new type of piezoelectrically actuated scanning micromirror using bulk PZT (lead zirconate titanate) plate and an integrated electromagnetic deflection angle sensor. Proposed actuation mechanism utilizes a commercially available bulk PZT plate attached to a silicon substrate using adhesive. Fabricated device is experimentally characterized and analyzed using finite element analysis. An optical scan angle of 45° at 28.4kHz has been achieved at 50Vpp square wave input. Moreover, a simple deflection angle sensing method using integrated coil and external permanent magnet has been proposed and verified.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1537-1540
Number of pages4
ISBN (Electronic)9781728120072
DOIs
StatePublished - Jun 2019
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/TerritoryGermany
CityBerlin
Period23/06/1927/06/19

Bibliographical note

Funding Information:
This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1A2B4007830), and by the EU Framework program of the National Research Foundation (NRF) funded by the Ministry of Science, ICT & Future Planning (2014K1B1A1073720), and by the Center for Integrated Smart Sensor as GFP (CISS-2012M3A6A6054204).

Publisher Copyright:
© 2019 IEEE.

Keywords

  • Bulk PZT plate
  • Deflection angle sensor
  • MEMS scanning micromirror
  • Piezoelectric actuation

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