@inproceedings{53a6e0771723488a89c885760d8016f9,
title = "Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor",
abstract = "This paper presents a new type of piezoelectrically actuated scanning micromirror using bulk PZT (lead zirconate titanate) plate and an integrated electromagnetic deflection angle sensor. Proposed actuation mechanism utilizes a commercially available bulk PZT plate attached to a silicon substrate using adhesive. Fabricated device is experimentally characterized and analyzed using finite element analysis. An optical scan angle of 45° at 28.4kHz has been achieved at 50Vpp square wave input. Moreover, a simple deflection angle sensing method using integrated coil and external permanent magnet has been proposed and verified.",
keywords = "Bulk PZT plate, Deflection angle sensor, MEMS scanning micromirror, Piezoelectric actuation",
author = "Hwang, {Jeong Yeon} and Ji, {Chang Hyeon}",
note = "Funding Information: This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1A2B4007830), and by the EU Framework program of the National Research Foundation (NRF) funded by the Ministry of Science, ICT & Future Planning (2014K1B1A1073720), and by the Center for Integrated Smart Sensor as GFP (CISS-2012M3A6A6054204). Publisher Copyright: {\textcopyright} 2019 IEEE.; null ; Conference date: 23-06-2019 Through 27-06-2019",
year = "2019",
month = jun,
doi = "10.1109/TRANSDUCERS.2019.8808582",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1537--1540",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
}