Bottom-up evolution of consolidated porous diamond layer by hot-filament-CVD

  • Jung Min Cho
  • , Hak Joo Lee
  • , Young Jin Ko
  • , Heon Jin Choi
  • , Young Joon Baik
  • , Gyu Weon Hwang
  • , Jong Keuk Park
  • , Joon Young Kwak
  • , Jaewook Kim
  • , Jongkil Park
  • , Yeon Joo Jeong
  • , Inho Kim
  • , Kyeong Seok Lee
  • , Wook Seong Lee

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Synthesis of the porous chemical vapor deposition (CVD) diamond layer, which might enable many noble applications, usually employed the template growth or post-processing, which accompanied the undesirable complexity and cost issues. In a small number of the porous diamond layer synthesis efforts, majority of them employed the plasma-assisted CVD (PA-CVD), while the hot-filament CVD (HF-CVD) was well known for its outstanding scalability and cost-effectiveness. Here we demonstrate a post-processing/template-free approach for the porous diamond layer synthesis by HF-CVD. Intriguingly, we found that the seeding the substrate by detonation nanodiamond (DND) and the relatively low substrate temperature were key enabling factors. The consolidated layer was consisted of quasi-spherical nanodiamond particles. Such observations suggested a precipitation-relevant growth mechanism, which we disproved here, and we clarified an alternative bottom-up growth mechanism. We also demonstrated a preliminary result of applying the porous diamond layer as a waveguide in the attenuated-total-reflection (ATR)-type waveguide mode resonance sensor.

Original languageEnglish
Article number102362
JournalSurfaces and Interfaces
Volume34
DOIs
StatePublished - Nov 2022

Bibliographical note

Publisher Copyright:
© 2022 Elsevier B.V.

Keywords

  • CVD diamond
  • Hot-filament CVD
  • Nucleation/growth mechanism
  • One-batch synthesis
  • Optical waveguide
  • Porous diamond layer

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