TY - GEN
T1 - Biophotonic MEMS for single molecule detection and manipulation
AU - Seo, Jeonggi
AU - Kuyper, C. L.
AU - Chiu, D. T.
AU - Lee, L. P.
N1 - Funding Information:
This research was supported by DARPA BioFlip program and the microfluidic devices were fabricated in Mirolab in University of California at Berkeley.
Publisher Copyright:
© 2002 IEEE.
PY - 2002
Y1 - 2002
N2 - The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic SixNy microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just SixNy membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the SixNy membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.
AB - The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic SixNy microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just SixNy membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the SixNy membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.
KW - 2-D scanner
KW - Biophotonic MEMS
KW - optical trapping
KW - silicon nitride
KW - single-molecule detection
UR - http://www.scopus.com/inward/record.url?scp=84901974076&partnerID=8YFLogxK
U2 - 10.1109/MMB.2002.1002347
DO - 10.1109/MMB.2002.1002347
M3 - Conference contribution
AN - SCOPUS:84901974076
T3 - 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
SP - 363
EP - 368
BT - 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
A2 - Beebe, David
A2 - Dittmar, Andre
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology
Y2 - 2 May 2002 through 4 May 2002
ER -