Abstract
The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic SixNy microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just SixNy membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the SixNy membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.
Original language | English |
---|---|
Title of host publication | 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings |
Editors | David Beebe, Andre Dittmar |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 363-368 |
Number of pages | 6 |
ISBN (Electronic) | 0780374800, 9780780374805 |
DOIs | |
State | Published - 2002 |
Event | 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Madison, United States Duration: 2 May 2002 → 4 May 2002 |
Publication series
Name | 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings |
---|
Conference
Conference | 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology |
---|---|
Country/Territory | United States |
City | Madison |
Period | 2/05/02 → 4/05/02 |
Bibliographical note
Publisher Copyright:© 2002 IEEE.
Keywords
- 2-D scanner
- Biophotonic MEMS
- optical trapping
- silicon nitride
- single-molecule detection