Biophotonic MEMS for single molecule detection and manipulation

Jeonggi Seo, C. L. Kuyper, D. T. Chiu, L. P. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic SixNy microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just SixNy membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the SixNy membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.

Original languageEnglish
Title of host publication2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
EditorsDavid Beebe, Andre Dittmar
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages363-368
Number of pages6
ISBN (Electronic)0780374800, 9780780374805
DOIs
StatePublished - 2002
Event2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Madison, United States
Duration: 2 May 20024 May 2002

Publication series

Name2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Conference

Conference2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology
Country/TerritoryUnited States
CityMadison
Period2/05/024/05/02

Bibliographical note

Publisher Copyright:
© 2002 IEEE.

Keywords

  • 2-D scanner
  • Biophotonic MEMS
  • optical trapping
  • silicon nitride
  • single-molecule detection

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