Biophotonic MEMS for single molecule detection and manipulation

Jeonggi Seo; C. L. Kuyper; D. T. Chiu; L. P. Lee

doi:10.1109/MMB.2002.1002347

Biophotonic MEMS for single molecule detection and manipulation

Jeonggi Seo, C. L. Kuyper, D. T. Chiu, L. P. Lee

Department of Chemistry & Nanoscience

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic Si_xN_y microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just Si_xN_y membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the Si_xN_y membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.

Original language	English
Title of host publication	2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
Editors	David Beebe, Andre Dittmar
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	363-368
Number of pages	6
ISBN (Electronic)	0780374800, 9780780374805
DOIs	https://doi.org/10.1109/MMB.2002.1002347
State	Published - 2002
Event	2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Madison, United States Duration: 2 May 2002 → 4 May 2002

Publication series

Name	2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Conference

Conference	2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology
Country/Territory	United States
City	Madison
Period	2/05/02 → 4/05/02

Bibliographical note

Publisher Copyright:
© 2002 IEEE.

Keywords

2-D scanner
Biophotonic MEMS
optical trapping
silicon nitride
single-molecule detection

Access to Document

10.1109/MMB.2002.1002347

Cite this

Seo, J., Kuyper, C. L., Chiu, D. T., & Lee, L. P. (2002). Biophotonic MEMS for single molecule detection and manipulation. In D. Beebe, & A. Dittmar (Eds.), 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings (pp. 363-368). Article 1002347 (2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MMB.2002.1002347

Seo, Jeonggi ; Kuyper, C. L. ; Chiu, D. T. et al. / Biophotonic MEMS for single molecule detection and manipulation. 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings. editor / David Beebe ; Andre Dittmar. Institute of Electrical and Electronics Engineers Inc., 2002. pp. 363-368 (2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings).

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title = "Biophotonic MEMS for single molecule detection and manipulation",

abstract = "The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic SixNy microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just SixNy membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the SixNy membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.",

keywords = "2-D scanner, Biophotonic MEMS, optical trapping, silicon nitride, single-molecule detection",

author = "Jeonggi Seo and Kuyper, {C. L.} and Chiu, {D. T.} and Lee, {L. P.}",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology ; Conference date: 02-05-2002 Through 04-05-2002",

year = "2002",

doi = "10.1109/MMB.2002.1002347",

language = "English",

series = "2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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}

Seo, J, Kuyper, CL, Chiu, DT & Lee, LP 2002, Biophotonic MEMS for single molecule detection and manipulation. in D Beebe & A Dittmar (eds), 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings., 1002347, 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 363-368, 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Madison, United States, 2/05/02. https://doi.org/10.1109/MMB.2002.1002347

Biophotonic MEMS for single molecule detection and manipulation. / Seo, Jeonggi; Kuyper, C. L.; Chiu, D. T. et al.
2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings. ed. / David Beebe; Andre Dittmar. Institute of Electrical and Electronics Engineers Inc., 2002. p. 363-368 1002347 (2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Seo, Jeonggi

AU - Kuyper, C. L.

AU - Chiu, D. T.

AU - Lee, L. P.

PY - 2002

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N2 - The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic SixNy microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just SixNy membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the SixNy membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.

AB - The development of biophotonic MEMS for single molecule detection (SMD), manipulation and optical trapping is presented. Integrated cyclic SixNy microfluidic devices with microelectrodes are fabricated with surface micromachining techniques. Microfluidic channels in the optical windows consist of just SixNy membrane without substrates. Capability of SMD, manipulation and optical trapping are demonstrated with the SixNy membrane channels. Such a device can be used in high throughput screening bioassay chips, which require multiplexed processing, SMD, and manipulation capability. Compared with earlier works on microfluidic devices formed by bonding two-glass substrates or polymers, our multiplexed design has attractive features such as bondless nano- and microfluidic channels, low transmission loss, and high stability to temperature and chemicals. The advanced biophotonic MEMS will have characterization and multiple manipulation tools for high-resolution spectroscopic analysis, robotic controls, and microscale lab automations on a chip.

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KW - Biophotonic MEMS

KW - optical trapping

KW - silicon nitride

KW - single-molecule detection

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M3 - Conference contribution

AN - SCOPUS:84901974076

T3 - 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

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BT - 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

A2 - Beebe, David

A2 - Dittmar, Andre

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology

Y2 - 2 May 2002 through 4 May 2002

ER -

Seo J, Kuyper CL, Chiu DT, Lee LP. Biophotonic MEMS for single molecule detection and manipulation. In Beebe D, Dittmar A, editors, 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2002. p. 363-368. 1002347. (2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings). doi: 10.1109/MMB.2002.1002347

Biophotonic MEMS for single molecule detection and manipulation

Abstract

Publication series

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Bibliographical note

Keywords

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