Biaxial vector-graphic scanning micromirror using radial magnetic field

A. Han; A. R. Cho; S. Ju; B. Yoon; S. Lee; T. Kim; J. U. Bu; C. H. Ji

doi:10.1109/TRANSDUCERS.2015.7181055

Biaxial vector-graphic scanning micromirror using radial magnetic field

A. Han, A. R. Cho, S. Ju, B. Yoon, S. Lee, T. Kim, J. U. Bu, C. H. Ji

Electronic and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

This paper presents the design, fabrication, and measurement results of an electromagnetic biaxial vector-graphic scanning micromirror. Instead of utilizing locally distributed magnetic fields from multiple magnets, radial magnetic field from concentric magnet assembly and unique coil geometry have been used to realize independent scan along two perpendicular axes irrespective of operation frequency. Proposed actuation mechanism also enables the use of a compact non-hermetic polymer-based package due to large driving torque and simple structure without any gap-closing microstructures. The magnet assembly is placed under the micromirror die with passive alignment and gap control during assembly process. Mechanical half scan angle of 11.6° and 3.8° have been achieved at DC current of 250mA and 400mA for horizontal and vertical scans, respectively.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	843-846
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181055
State	Published - 5 Aug 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: 21 Jun 2015 → 25 Jun 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	21/06/15 → 25/06/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

Electromagnetic actuation
Laser scanning
Radial magnetic field
Vector-graphic scanning micromirror

Access to Document

10.1109/TRANSDUCERS.2015.7181055

Cite this

Han, A., Cho, A. R., Ju, S., Yoon, B., Lee, S., Kim, T., Bu, J. U., & Ji, C. H. (2015). Biaxial vector-graphic scanning micromirror using radial magnetic field. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 843-846). Article 7181055 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181055

Han, A. ; Cho, A. R. ; Ju, S. et al. / Biaxial vector-graphic scanning micromirror using radial magnetic field. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 843-846 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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title = "Biaxial vector-graphic scanning micromirror using radial magnetic field",

abstract = "This paper presents the design, fabrication, and measurement results of an electromagnetic biaxial vector-graphic scanning micromirror. Instead of utilizing locally distributed magnetic fields from multiple magnets, radial magnetic field from concentric magnet assembly and unique coil geometry have been used to realize independent scan along two perpendicular axes irrespective of operation frequency. Proposed actuation mechanism also enables the use of a compact non-hermetic polymer-based package due to large driving torque and simple structure without any gap-closing microstructures. The magnet assembly is placed under the micromirror die with passive alignment and gap control during assembly process. Mechanical half scan angle of 11.6° and 3.8° have been achieved at DC current of 250mA and 400mA for horizontal and vertical scans, respectively.",

keywords = "Electromagnetic actuation, Laser scanning, Radial magnetic field, Vector-graphic scanning micromirror",

author = "A. Han and Cho, {A. R.} and S. Ju and B. Yoon and S. Lee and T. Kim and Bu, {J. U.} and Ji, {C. H.}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",

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doi = "10.1109/TRANSDUCERS.2015.7181055",

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Han, A, Cho, AR, Ju, S, Yoon, B, Lee, S, Kim, T, Bu, JU & Ji, CH 2015, Biaxial vector-graphic scanning micromirror using radial magnetic field. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181055, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 843-846, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 21/06/15. https://doi.org/10.1109/TRANSDUCERS.2015.7181055

Biaxial vector-graphic scanning micromirror using radial magnetic field. / Han, A.; Cho, A. R.; Ju, S. et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 843-846 7181055 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Biaxial vector-graphic scanning micromirror using radial magnetic field

AU - Han, A.

AU - Cho, A. R.

AU - Ju, S.

AU - Yoon, B.

AU - Lee, S.

AU - Kim, T.

AU - Bu, J. U.

AU - Ji, C. H.

PY - 2015/8/5

Y1 - 2015/8/5

N2 - This paper presents the design, fabrication, and measurement results of an electromagnetic biaxial vector-graphic scanning micromirror. Instead of utilizing locally distributed magnetic fields from multiple magnets, radial magnetic field from concentric magnet assembly and unique coil geometry have been used to realize independent scan along two perpendicular axes irrespective of operation frequency. Proposed actuation mechanism also enables the use of a compact non-hermetic polymer-based package due to large driving torque and simple structure without any gap-closing microstructures. The magnet assembly is placed under the micromirror die with passive alignment and gap control during assembly process. Mechanical half scan angle of 11.6° and 3.8° have been achieved at DC current of 250mA and 400mA for horizontal and vertical scans, respectively.

AB - This paper presents the design, fabrication, and measurement results of an electromagnetic biaxial vector-graphic scanning micromirror. Instead of utilizing locally distributed magnetic fields from multiple magnets, radial magnetic field from concentric magnet assembly and unique coil geometry have been used to realize independent scan along two perpendicular axes irrespective of operation frequency. Proposed actuation mechanism also enables the use of a compact non-hermetic polymer-based package due to large driving torque and simple structure without any gap-closing microstructures. The magnet assembly is placed under the micromirror die with passive alignment and gap control during assembly process. Mechanical half scan angle of 11.6° and 3.8° have been achieved at DC current of 250mA and 400mA for horizontal and vertical scans, respectively.

KW - Electromagnetic actuation

KW - Laser scanning

KW - Radial magnetic field

KW - Vector-graphic scanning micromirror

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M3 - Conference contribution

AN - SCOPUS:84955497727

T3 - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

SP - 843

EP - 846

BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Y2 - 21 June 2015 through 25 June 2015

ER -

Han A, Cho AR, Ju S, Yoon B, Lee S, Kim T et al. Biaxial vector-graphic scanning micromirror using radial magnetic field. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 843-846. 7181055. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7181055

Biaxial vector-graphic scanning micromirror using radial magnetic field

Abstract

Publication series

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Bibliographical note

Keywords

Access to Document

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