Biaxial vector-graphic scanning micromirror using radial magnetic field

A. Han, A. R. Cho, S. Ju, B. Yoon, S. Lee, T. Kim, J. U. Bu, C. H. Ji

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

This paper presents the design, fabrication, and measurement results of an electromagnetic biaxial vector-graphic scanning micromirror. Instead of utilizing locally distributed magnetic fields from multiple magnets, radial magnetic field from concentric magnet assembly and unique coil geometry have been used to realize independent scan along two perpendicular axes irrespective of operation frequency. Proposed actuation mechanism also enables the use of a compact non-hermetic polymer-based package due to large driving torque and simple structure without any gap-closing microstructures. The magnet assembly is placed under the micromirror die with passive alignment and gap control during assembly process. Mechanical half scan angle of 11.6° and 3.8° have been achieved at DC current of 250mA and 400mA for horizontal and vertical scans, respectively.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages843-846
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - 5 Aug 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 21 Jun 201525 Jun 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/TerritoryUnited States
CityAnchorage
Period21/06/1525/06/15

Keywords

  • Electromagnetic actuation
  • Laser scanning
  • Radial magnetic field
  • Vector-graphic scanning micromirror

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