Abstract
A p-channel SONOS memory, based on band-to-band tunneling initiated avalanche hot-hole injection mechanism, was firstly proposed to solve the F-N erase problem in NAND flash application. The fabricated device with 50-nm gate length effectively suppressed the short channel effect and featured an excellent program and erase performance, where the time scale of a few and ∼100 μsec could be obtained, respectively.
Original language | English |
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Article number | 1469237 |
Pages (from-to) | 122-123 |
Number of pages | 2 |
Journal | Digest of Technical Papers - Symposium on VLSI Technology |
Volume | 2005 |
DOIs | |
State | Published - 2005 |
Event | 2005 Symposium on VLSI Technology - Kyoto, Japan Duration: 14 Jun 2005 → 14 Jun 2005 |