Argon cluster impacts on layered silicon, silica, and graphite surfaces

J. Samela; K. Nordlund; J. Keinonen; V. N. Popok; E. E.B. Campbell

doi:10.1140/epjd/e2007-00104-y

Argon cluster impacts on layered silicon, silica, and graphite surfaces

J. Samela
, K. Nordlund
, J. Keinonen
, V. N. Popok
, E. E.B. Campbell

Department of Physics

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Abstract

Seven structures of covalently bonded materials are used as targets of 6 keV Ar₁₂ cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

Original language	English
Pages (from-to)	181-184
Number of pages	4
Journal	European Physical Journal D
Volume	43
Issue number	1-3
DOIs	https://doi.org/10.1140/epjd/e2007-00104-y
State	Published - Jul 2007

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title = "Argon cluster impacts on layered silicon, silica, and graphite surfaces",

abstract = "Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.",

author = "J. Samela and K. Nordlund and J. Keinonen and Popok, \{V. N.\} and Campbell, \{E. E.B.\}",

year = "2007",

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language = "English",

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journal = "European Physical Journal D",

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AU - Samela, J.

AU - Nordlund, K.

AU - Keinonen, J.

AU - Popok, V. N.

AU - Campbell, E. E.B.

PY - 2007/7

Y1 - 2007/7

N2 - Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

AB - Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

UR - https://www.scopus.com/pages/publications/34249717732

U2 - 10.1140/epjd/e2007-00104-y

DO - 10.1140/epjd/e2007-00104-y

M3 - Article

AN - SCOPUS:34249717732

SN - 1434-6060

VL - 43

SP - 181

EP - 184

JO - European Physical Journal D

JF - European Physical Journal D

IS - 1-3

ER -

Argon cluster impacts on layered silicon, silica, and graphite surfaces

Abstract

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