Application of a new Cl-plasma-treated Ag/AgCl reference electrode to micromachined glucose sensor

Se Ik Park, Sang Beom Jun, Sejin Park, Hee Chan Kim, Sung June Kim

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

Micromachined glucose sensors were fabricated and integrated with the plasma-treated Ag/AgCl reference electrodes for the first time. The surface of the Cl-plasma exposed AgCl layers was of granule-shaped morphology and showed the favorable long-term stability with a 13-mV potential drift after 5 h over a commercial liquid-junction Ag/AgCl reference electrode in phosphate buffered saline. The fabricated devices showed a typical behavior of an amperometric glucose sensor and a successful operation as a three-electrode system. Due to the integrability of the reference electrode and the use of low-temperature steps only, the new micromachined process can allow easy mass production of the device and the monolithic integration of signal processing circuitry in the future.

Original languageEnglish
Pages (from-to)267-273
Number of pages7
JournalIEEE Sensors Journal
Volume3
Issue number3
DOIs
StatePublished - Jun 2003

Keywords

  • Mass production
  • Micromachined glucose sensor
  • Monolithic integration
  • Plasma-treated Ag/AgCl reference electrode
  • Potential drift

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