Analysis of the T Si5-Dependent Subthreshold Characteristics in Lightly-Doped Asymmetric Double-Gate MOSFETs

Hyerim Lee, Hyungsoon Shin

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

The subthreshold characteristics of double-gate (DG) MOSFETs with various thicknesses of a Si film (T Si) are analyzed. It is found that, in comparison to the symmetrical DG-MOSFET, the subthreshold characteristics of the lightly-doped asymmetric device have a larger dependence on T Si, which is due to the linear distribution of the potential in the Si-film region. Further, we derive an analytical equation which can explain these phenomena and verify the accuracy of the analytical equation by comparing them with the device simulation results. Due to these T Sisensitive subthreshold characteristics, tight control of T Si is required for lightly-doped asymmetric DG-MOSFETs to keep a large I on/I off ratio.

Original languageEnglish
Pages (from-to)56-59
Number of pages4
JournalJournal of the Korean Physical Society
Volume44
Issue number1
StatePublished - Jan 2004

Keywords

  • Double-Gate MOSFET
  • Subthreshold characteristics
  • Volume inversion

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