Abstract
The subthreshold characteristics of double-gate (DG) MOSFETs with various thicknesses of a Si film (T Si) are analyzed. It is found that, in comparison to the symmetrical DG-MOSFET, the subthreshold characteristics of the lightly-doped asymmetric device have a larger dependence on T Si, which is due to the linear distribution of the potential in the Si-film region. Further, we derive an analytical equation which can explain these phenomena and verify the accuracy of the analytical equation by comparing them with the device simulation results. Due to these T Sisensitive subthreshold characteristics, tight control of T Si is required for lightly-doped asymmetric DG-MOSFETs to keep a large I on/I off ratio.
Original language | English |
---|---|
Pages (from-to) | 56-59 |
Number of pages | 4 |
Journal | Journal of the Korean Physical Society |
Volume | 44 |
Issue number | 1 |
State | Published - Jan 2004 |
Keywords
- Double-Gate MOSFET
- Subthreshold characteristics
- Volume inversion