An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame

Chang Hyeon Ji, Moongoo Choi, Sang Cheon Kim, See Hyung Lee, Seong Hyok Kim, Youngjoo Yee, Jong Uk Bu

Research output: Contribution to journalArticlepeer-review

44 Scopus citations

Abstract

We present the design, fabrication and measurement results of a comb-driven electrostatic scanning micromirror. Instead of a conventional micromirror having uniform thickness across the entire reflective surface, a diaphragm mirror plate supported by an array of diamond-shaped frame structures is fabricated monolithically. The fabrication process is a simple sequence of silicon deep etch processes on both sides of the silicon-on-insulator (SOI) substrate without the substrate bonding process. The micromirror is fabricated on the device layer of the substrate. The mirror plate undergoes a rotational motion by an electrostatic force between the movable comb electrodes connected to the micromirror and stationary comb electrode formed on the handle wafer. A scanning micromirror with a 10 νm thick diaphragm mirror plate, having a planar dimension of 1.5 × 1.5 mm2, supported by an array of 110 νm thick rhombic support frames, was fabricated and tested. A mechanical deflection angle of 8.5° at a resonance frequency of 19.55 kHz and a pressure of 7 mTorr was obtained. A prototype of the raster scanning laser projection display system was developed using the fabricated micromirror as the horizontal scanner and a galvanomirror as the vertical scanner, respectively.

Original languageEnglish
Pages (from-to)1033-1039
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume16
Issue number5
DOIs
StatePublished - 1 May 2006

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