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Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices
Hakseong Kim, Dong Hoon Shin, Kirstie McAllister, Miri Seo, Sangik Lee, Il Suk Kang, Bae Ho Park, Eleanor E.B. Campbell, Sang Wook Lee
Research output: Contribution to journal › Article › peer-review
6
Scopus
citations