Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices

Hakseong Kim, Dong Hoon Shin, Kirstie McAllister, Miri Seo, Sangik Lee, Il Suk Kang, Bae Ho Park, Eleanor E.B. Campbell, Sang Wook Lee

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Engineering & Materials Science

Chemical Compounds