Abstract
A novel partially-depleted (PD) SONOS FinFET is demonstrated for unified function of a high speed capacitorless 1T-DRAM and non-volatile memory (NVM). A floating body and O/N/O layer are combined in a single FinFET to provide multi-functional unified-RAM (URAM) operation. The fabricated URAM shows a VT window of 3V with a retention time exceeding 10 years for NVM operation and a sensing margin of 9μA with a program/erase time of 10nsec for IT-DRAM operation in a single memory cell transistor.
Original language | English |
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Article number | 4419104 |
Pages (from-to) | 929-932 |
Number of pages | 4 |
Journal | Technical Digest - International Electron Devices Meeting, IEDM |
DOIs | |
State | Published - 2007 |
Event | 2007 IEEE International Electron Devices Meeting, IEDM - Washington, DC, United States Duration: 10 Dec 2007 → 12 Dec 2007 |