A novel MEMS probe array for the biological measurement

In this paper, the concept of a probe array for the measurement of biological properties is firstly proposed and we firstly implement a novel probe array for the biological measurement using MEMS technology. Through this work, we experimentally show the feasibility of the micromachined probe array for biological application. Until now, there have been no researches about probe array for the dielectric measurement. Many researchers have performed the dielectric measurement of liquids or biological samples using a single probe which is manufactured by laser machining. They should perform repetitive experiments point by point in order to extract the biological information of multiple points using a single probe. Moreover the size of single probe and Subminiature A (SMA) connector, which is connected with probe and test cable of network analyzer, are limited and the cost of probe and connector are very high. However, we can obtain the biological information of multiple points by one contact with a sample using the MEMS probe array at a time. Also we can reduce the size and cost of probe using wafer level process.