A novel fabrication method of a vertical comb drive using a single SOI wafer for optical MEMS applications

Ki Hun Jeong, L. P. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

10 Scopus citations

Abstract

A novel method for fabricating a self-aligned electrostatic vertical comb drive using a single layer of a SOI wafer is introduced. The fixed combs are anchored to bimorph cantilevers made of two materials with dissimilar thermal coefficient of expansion, i.e., silicon dioxide and single crystal silicon. The cantilever, which provides the vertical offset between fixed comb and movable comb, is deflected by residual stress during cooling down from oxidation temperature to room temperature. In piston motion, the vertical amplitude at the resonant frequency of 3.5 kHz was 30 μm. In torsional motion, the angle of optical deflection at the resonance of 830 Hz was changed by 6.5°. The measured resonant frequencies correspond to the results form a finite element analysis within 10%. This vertical comb drive is useful for optical and biophotonic MEMS requiring out-of-plane torsional or piston motion.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1462-1465
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 8 Jun 200312 Jun 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/TerritoryUnited States
CityBoston
Period8/06/0312/06/03

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Keywords

  • Biomedical optical imaging
  • Crystalline materials
  • Electrostatics
  • Micromechanical devices
  • Optical device fabrication
  • Optical materials
  • Pistons
  • Resonant frequency
  • Temperature
  • Thermal expansion

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