A new method of increasing numerical aperture of microlens for biophotonic MEMS

Ki Hun Jeong, L. P. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

19 Scopus citations

Abstract

A novel method for increasing numerical aperture of microlens for biophotonic applications is presented in this paper. It is based on the control of UV curable polymer lenslet volume and surface energy of substrates. The volume control of polymer lenslets for tuning the focal length is accomplished on the substrates with different surface energies by a microdispensing method. Microlens with high numerical aperture is fabricated on the control layer of a hydrophobic polymer deposited on the cover substrate of a microfluidic chip. Microlenses with different numerical apertures have been designed and characterized. The high numerical aperture microlens integrated on a microfluidic chip will allow high-resolution and high signal to noise detection in biophotonic MEMS applications.

Original languageEnglish
Title of host publication2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
EditorsDavid Beebe, Andre Dittmar
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages380-383
Number of pages4
ISBN (Electronic)0780374800, 9780780374805
DOIs
StatePublished - 2002
Event2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Madison, United States
Duration: 2 May 20024 May 2002

Publication series

Name2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Conference

Conference2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology
Country/TerritoryUnited States
CityMadison
Period2/05/024/05/02

Bibliographical note

Funding Information:
ACKNOWLEDGEMENT This work is supported by BIOFLIPS program of Defense Advanced Research Projects Agency.

Publisher Copyright:
© 2002 IEEE.

Keywords

  • focal length control
  • Microlens
  • numerical aperture control

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